Effects of phonon pore scattering and pore randomness on effective conductivity of porous silicon

International Journal of Heat and Mass Transfer

Volumn 43, Issue 4, 2000, Pages 521-538

  Chung, Jae Dong ^a,b   Kaviany, Massoud ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MATHEMATICAL MODELS; MICROELECTRONICS; PHONONS; PORE SIZE; POROUS SILICON; THERMAL INSULATION;

BOLTZMANN TRANSPORT EQUATION; EFFECTIVE CONDUCTIVITY; PHONON MEAN FREE PATH; PHONON PORE SCATTERING; PORE RANDOMNESS; PORE STRUCTURE;

THERMAL CONDUCTIVITY OF SOLIDS;

MICROELECTRONICS; POROUS MEDIUM; SILICON; THERMAL CONDUCTIVITY;

EID: 0009642109     PISSN: 00179310     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0017-9310(99)00165-9     Document Type: Article

References (38)

1. L.T. Canham, Porous semiconductors: a tutorial review, Mat. Res. Soc. Symp. Proc 452 (1997) 29-42.
2. I. Nozad, R.G. Carbonell, S. Whitaker, Heat conduction in multi-phase system. Part I: Theory and experiments for two-phase systems, Chem. Engng. Sei 40 (1985) 843-855.
3. T.H. Bauer, A general analytical approach toward the thermal conductivity of porous media, Int. J. Heat Mass Transfer 36 (1993) 4181-4191.
4. S.L. Lee, J.H. Yang, Modelling of effective thermal conductivity for a nonhomogeneous anisotropic medium, Int. J. Heat Mass Transfer 41 (1998) 931-937.
5. M. Kaviany, Principles of Heat Transfer in Porous Media, 2nd ed, Springer-Verlag, New York, 1995.
6. K. Nishioka, T. Murayama, Y. Ono, Estimation of effective thermal diffusivity of porous solid using data for image processing, ISIJ International 36 (1996) ISO-155.
7. K. Bakker, Using the finite element method to compute the influence of complex porosity and inclusion structures on the thermal and electrical conductivity, Int. J. Heat Mass Transfer 40 (1997) 3503-3511.
8. J.M. Ziman, Electron and Phonons, Oxford University Press, Oxford, 1960.
9. A. Drost, P. Steiner, H. Moser, W. Lang, Thermal conductivity of porous silicon, Sensors and Materials 7 (1995) 111-120.
10. G. Benedetto, L. Boarino, R. Spagnolo, Evaluation of thermal conductivity of porous silicon layers by a photoacoustic method, Appl. Phys. A 64 (1997) 155-159.
11. G. Gesele, J. Linsmeier, V. Drach, R. Arens-Fischer, Temperature-dependent thermal conductivity of porous silicon, J. Phys. D: Appl. Phys 30 (1997) 2911-2916.
12. S.S. Tsao, T.R. Guilinger, M.J. Kelly, Porous silicon formation in n~ /n+/n~~ doped structures, J. Electrochem. Soc 138 (1991) 1739-1743.
13. M.I.J. Beale, J.D. Benjamin, M.J. Uren, N.G. Chew, A.G. Cullis, An experimental and theoretical study of the formation and microstructure of porous silicon, Journal of Crystal Growth 73 (1985) 622-636.
14. R.L. Smith, S.D. Collins, Porous silicon formation mechanisms, J. Appl. Phys 71 (1992) R1-R22.
15. R.L. Smith, S.F. Chuang, S.D. Collins, A theoretical model of the formation morphologies of porous, J. Electron. Mater 17 (1988) 533-541.
16. A. Majumdar, Microscale heat conduction in dielectric thin films, ASME Journal of Heat Transfer 115 (1993) 7-16.
17. C.L. Tien, G. Chen, Challenges in microscale conductive and radiative heat transfer, Journal of Heat Transfer 116 (1994) 799-807.
18. G. Chen, Thermal conductivity and ballistic-phonon transport in the cross-pane direction of superlattices, Physical Review B 57 (1998) 14958-14973.
19. W.S. Capinski, H.J. Maris, Thermal conductivity of GaAs/AlAs superlattices, Physica B 219/220 (1996) 699-701.
20. X.Y. Yu, G. Chen, A. Verma, J.S. Smith, Temperature dependence of thermophysical properties of GaAs, AlAs periodic structure, Appl. Phys. Lett 67 (1995) 3554-3556.
21. S.M. Lee, D.G. Cahill, Thermal conductivity of Si-Ge superlattices, Appl. Phys. Lett 70 (1997) 2957-2959.
22. Y.S. Touloukian, R.W. Powell, C.Y. Ho, P.O. Klemens, Thermophysical Properties of Matter, IFI/Plenum Press, New York/Washington, 1970.
23. S.V. Patankar, Numerical Heat Transfer and Fluid Flow, Hemisphere, Washington, DC, 1980.
24. C.J. Kim, S.T. Ro, A block-correction aided strongly implicit solver for the five-point formulation of elliptic differential equations, Int. J. Heat Mass Transfer 38 (1995) 999-1008.
25. P.J. Schneider, Conduction, in: W.M. Rohsenow, J.P. Hartnett, E.N. Ganic (Eds.), Handbook of Heat Transfer Fundamentals, 2nd ed, McGraw-Hill, New York, 1985 (Chapter 4).
26. W.G. Vincenti, C.H. Kruger, Introduction to Physical Gas Dynamics, Robert Krieger, New York, 1977.
27. R. Siegel, J.R. Howell, Thermal Radiation Heat Transfer, Hemisphere, Washington, DC, 1992.
28. M.F. Modest, Radiative Heat Transfer, McGraw-Hill, New York, 1993.
29. K.D. Lathrop, Spatial differencing of the transport equation: positivity vs. accuracy, J. Computational Phys 4(1968)475-498.
30. W.A. Fiveland, The selection of discrete ordinale quadrature sets for anisotropic scattering, HTD 160 (1991) 89-96.
31. M.N. Ozisik, Radiative Transfer and Interactions with Conduction and Convection, Wiley, New York, 1973.
32. M. Asheghi, M.N. Touzelbaev, K.E. Goodson, Y.K. Leung, S.S. Wong, Temperature-dependent thermal conductivity of single-crystal silicon layers in SOI substrates, ASME Journal of Heat Transfer 120 (1998) 3036.
33. E.T. Swartz, R.O. Pohl, Thermal boundary resistance, Review of Modern Physics 61 (1989) 605-668.
34. R.L. Smith, S.D. Collins, Generalized model for the diffusion-limited aggregation and Efen models of cluster growth, Physical Review A 39 (1989) 5409-5413.
35. M. Kaviany, Principles of Heat Transfer, Course Pack, University of Michigan, 1998.
36. M.G. Holland, Analysis of lattice thermal conductivity, Physical Review 132 (1963) 2461-2471.
37. M.I. Flik, B.I. Choi, K.E. Goodson, Heat transfer regimes in microstructures, ASME Journal of Heat Transfer 114(1992) 666-674.
38. W.A. Fiveland, J.P. Jessee, Acceleration schemes for the discrete ordinales method, Journal of Thermophysics and Heal Transfer 10 (1996) 445-451.