Fabrication process for thick-film micromachined multi-pole electromagnets

Journal of Microelectromechanical Systems

Volumn 23, Issue 3, 2014, Pages 505-507

  Harrison, Jere ^a,b   Paydar, Omeed ^a   Hwang, Yongha ^a   Wu, Jimmy ^a   Threlkeld, Evan ^a   Musumeci, Pietro ^a   Candler, Robert N ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b CALIFORNIA NANOSYSTEMS INSTITUTE   (United States)

Author keywords

Electromagnets; Magnetic devices; Micromachining; Particle beam steering; Particle focusing.; Thick film devices

Indexed keywords

ASPECT RATIO; ELECTROMECHANICAL DEVICES; FABRICATION; MAGNETIC DEVICES; MAGNETIC MATERIALS; MEMS; MICROMACHINING; POLES; THICK FILM DEVICES;

FABRICATION PROCESS; FREE SPACES; HIGH ASPECT RATIO; HIGH-INTENSITY FIELDS; MAGNETIC ALLOY; MICRO-MACHINED; PARTICLE FOCUSING; SOLENOIDAL COILS;

ELECTROMAGNETS;

EID: 84901984927     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2014.2315763     Document Type: Article

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