Development of micro-heaters with optimized temperature compensation design for gas sensors

Sensors

Volumn 11, Issue 3, 2011, Pages 2580-2591

  Hwang, Woo Jin ^a   Shin, Kyu Sik ^b   Roh, Ji Hyoung ^b   Lee, Dae Sung ^b   Choa, Sung Hoon ^a  

^a Seoul National University of Science and Technology   (South Korea)

^b Korea Electronic Technology Institute (KETI)   (South Korea)

Author keywords

Infrared radiation; Micro heater; Micro hotplate; NDIR gas sensor; Semiconductor gas sensor; Uniform heating characteristics

Indexed keywords

ARTICLE; COMPUTER SIMULATION; ELECTRICITY; EQUIPMENT DESIGN; FINITE ELEMENT ANALYSIS; GAS; HEATING; INFRARED RADIATION; INSTRUMENTATION; MATHEMATICAL COMPUTING; MICROELECTROMECHANICAL SYSTEM; TEMPERATURE;

COMPUTER SIMULATION; ELECTRICITY; EQUIPMENT DESIGN; FINITE ELEMENT ANALYSIS; GASES; HEATING; INFRARED RAYS; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; NUMERICAL ANALYSIS, COMPUTER-ASSISTED; TEMPERATURE;

EID: 79953324964     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s110302580     Document Type: Article

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