Design and simulation of electro-fabricated MEMS microhotplate for gas sensor applications

Journal of Physics: Conference Series

Volumn 34, Issue 1, 2006, Pages 643-649

  Wisitsoraat, A ^a   Tuantranont, A ^a   Lomas, T ^a  

^a NATIONAL ELECTRONICS AND COMPUTER TECHNOLOGY CENTER   (Thailand)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33744526626     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/34/1/106     Document Type: Article

References (6)

1. Cavicchi R, et al 1995 Growth of SnO2 films on micromachined hotplates Appl. Phys. Lett. 66 812-4
2. Semancik S, et al 2001 Microhotplate platforms for chemical sensor research Sens Act. B 77 579-91
3. Cavicchi R, J Suehle, K Kreider, M Gaitan 1995 Fast temperature programmed sensing for microhotplate gas sensors IEEE Electron Devices Letters vol 16 p 286-288 no 6
4. F Dimeo Jr, S Semancik, R Cavicchi, J Suehle, N Tea, M Vaudin, J Kelliher 1997 Silicon microhotplate arrays as a platform for efficient gas sensing thin film research Mater. Res. Soc. Symp. Proc. 444 203
5. Semancik S, Cavicchi R, Wheeler M, Tiany J, Poirier G, Walton 2001 R. Microhotplate platforms for chemical sensor research Sens. Actuators. B 77 579-91
6. Afridi M, A Hefner, DFiberning, C Ellenwood, A Varma, B Jacob and S Semancik 2004 MEMSbased embedded sensor virtual components for system-on-a-chip (SoC) Solid-State Electronics 48 1777-1781