Fabrication of light-scattering multiscale textures by nanoimprinting for the application to thin-film silicon solar cells

IEEE Journal of Photovoltaics

Volumn 4, Issue 3, 2014, Pages 772-777

  Meier, M ^a   Paetzold, U W ^a   Ghosh, M ^a   Zhang, W ^a   Merdzhanova, T ^a   Jost, G ^a   Sommer, N ^a   Michard, S ^a   Gordijn, A ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Light trapping; microcrystalline silicon; multiscale textures; nanoimprint; photovoltaics; thin film

Indexed keywords

FABRICATION; GLASS; LIGHT SCATTERING; MICROCRYSTALLINE SILICON; NANOIMPRINT LITHOGRAPHY; SILICON SOLAR CELLS; SUBSTRATES;

CONDUCTIVE OXIDES; LIGHT-TRAPPING; NANO-IMPRINT; PHOTOVOLTAICS; SILICON THIN-FILM SOLAR CELLS; SOLAR CELL DEVICES; THIN-FILM PHOTOVOLTAIC DEVICES; THIN-FILM SILICON SOLAR CELLS;

TEXTURES;

EID: 84899942849     PISSN: 21563381     EISSN: None     Source Type: Journal    
DOI: 10.1109/JPHOTOV.2014.2311233     Document Type: Article

References (26)

1. W. Beyer, J. Hüpkes, and H. Stiebig, "Transparent conducting oxide films for thin film silicon photovoltaics," Thin Solid Films, vol. 516, pp. 147-154, 2007. (Pubitemid 350110588)
2. W. Zhang, U. W. Paetzold, M. Meier, A. Gordijn, J. Hüpkes, and TMerdzhanova, "Thin film silicon solar cells on dry etched glass," Energy Procedia, vol. 44, pp. 151-159, 2014.
3. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, "Nanoimprint lithography," J. Vac. Sci. Technol. B, Microelectron. Process. Phenom., vol. 14, pp. 4129-4133, 1996. (Pubitemid 126582846)
4. L. Jay Guo, "Nanoimprint lithography: Methods and material requirements," Adv. Mater., vol. 19, pp. 495-513, 2007.
5. C. Battaglia, J. Escarre, K. Söderström, L. Erni, L. Ding, G. Bugnon, A. Billet, M. Boccard, L. Barraud, S. De Wolf, F.-J. Haug, M. Despeisse, and C. Ballif, "Nanoimprint lithography for high-efficiency thin-film silicon solar cells," Nano Lett., vol. 11, pp. 661-665, 2011.
6. J. Escarŕe, C. Battaglia, K. Söderström, C. Pahud, R. Biron, O. Cubero, F.-J. Haug, and C. Ballif, "UV imprinting for thin film solar cell application," J. Opt., vol. 14, 024009, 8 pp., 2012.
7. A. J. M. van Erven, M. Steltenpool,M. Bos, J. Rutten, G. van der Hofstad, J. Muller, H. de Groot, J. de Ruijter, B. Titulaer, and G. Rajeswaran, "Gen5 production tool for light management textures," in Proc. 38th IEEE Photovoltaic Spec. Conf., 2012, pp. 690-693.
8. M. C. R. Heijna, M. J. A. A. Goris, and W. J. Soppe, "Roll-to-roll nanotexturisation of layers on steel foil substrates for nip silicon solar cells," in Proc. 25th Eur. Photovoltaic Solar Energy Conf., 2010, pp. 3090-3093.
9. M. Meier, U. W. Paetzold, M. Prömpers, T. Merdzhanova, R. Carius, and A. Gordijn, "UVnanoimprint for the replication of etched ZnO: Al textures applied in thin-film silicon solar cells," Prog. Photovolt, Res. Appl., 2013, doi: 10. 1002/pip. 2382, to be published.
10. J. Escarŕe, K. Söderström, C. Battaglia, F.-J. Haug, and C. Ballif, "High fidelity transfer of nanometric random textures by UV embossing for thin film solar cells applications," Sol. Energy Mater. Sol. Cells, vol. 95, pp. 881-886, 2011.
11. C. Becker, V. Preidel, T. Sontheimer, C. Klimm, E. Rudigier-Voigt, M. Bockmeyer, and B. Rech, "Direct growth of periodic silicon nanostructures on imprinted glass for photovoltaic and photonic applications," Phys. Status Solidi C, vol. 9, pp. 2079-2082, 2012.
12. V. E. Ferry, M. A. Verschuuren, H. B. T. Li, E. Verhagen, R. J. Walters, R. Schropp, H. A. Atwater, and A. Polman, "Light-trapping in ultrathin photovoltaic devices," Opt. Exp., vol. 18, pp. 237-245, 2010.
13. U. W. Paetzold, E. Moulin, D. Michaelis, W. Böttler, C. Wächter, V. Hagemann, M. Meier, R. Carius, and U. Rau, "Plasmonic reflection grating back contacts for microcrystalline silicon solar cells," Appl. Phys. Lett., vol. 99, p. 181105, 2011.
14. C. Battaglia, C.-M. Hsu, K. Söderström, J. Escarŕe, F.-J. Haug, M. Charrière, M. Boccard, M. Despeisse, D. T. L. Alexander, M. Cantoni, Y. Cui, and C. Ballif, "Light trapping in solar cells: Can periodic beat random?" ACS Nano, vol. 6, pp. 2790-2797, 2012.
15. H. A. Atwater and A. Polman, "Plasmonics for improved photovoltaic devices," Nat. Mater., vol. 9, pp. 205-213, 2010.
16. U. W. Paetzold, W. Zhang, M. Prömpers, J. Kirchhoff, T. Merdzhanova, S. Michard, R. Carius, A. Gordijn, and M Meier, "Thin-film silicon solar cell development on imprint textured glass substrates," Mat. Sci. Eng. B, vol. 178, pp. 617-622, 2013.
17. M. Boccard, C. Battaglia, S. Hänni, K. Söderström, J. Escarŕe, S. Nicolay, F. Meillaud, M. Despeisse, and C. Ballif, "Multiscale transparent electrode architecture for efficient light management and carrier collection in solar cells," Nano Lett., vol. 12, pp. 1344-1348, 2012.
18. J. Hüpkes, J. I. Owen, E. Bunte, H. Zhu, S. E. Pust, J. Worbs, and G. Jost, "New texture etching of zinc oxide: Tunable light trapping FIR Si thin film solar cells," in Proc. 25th Eur. Photovoltaic Solar Energy Conf., 2008.
19. S. Gilles, M. Meier, M. Prömpers, A. v. d. Hart, C. Kügeler, A. Offenhäusser, and D. Mayer, "UV nanoimprint lithography with rigid polymer molds," Microelectron. Eng., vol. 86, pp. 661-664, 2009.
20. H. Gao, H. Tan,W. Zhang, K. Morton, and S. Y. Chou, "Air cushion press for excellent uniformity, high yield, and fast nanoimprint across a 100 mm field," Nano Lett., vol. 6, pp. 2438-2441, 2006. (Pubitemid 46076929)
21. S. Michard, M. Meier, B. Grootoonk, O. Astakhov, A. Gordijn, and F. Finger, "High deposition rate processes for the fabrication of microcrystalline silicon thin films," Mat. Sci. Eng. B, vol. 178, pp. 691-694, 2013.
22. G. Jost and J. Hüpkes, "Angle resolved scatteringmeasurements as quality analysis of textured ZnO: Al layers," to be published.
23. N. Sommer, S. Götzendörfer, F. Köhler,M. Ziegner, and J. Hüpkes, "Influence of deposition conditions and substrate morphology on the electrical properties of zinc oxide grown on texture-etched glass substrates," Thin Solid Films, to be published.
24. M. Python, O. Madani, D. Domine, F. Meillaud, E. Vallat-Sauvain, and C. Ballif, "Influence of the substrate geometrical parameters on microcrystalline silicon growth for thin-film solar cells," Sol. Energy Mater. Sol. Cells, vol. 93, pp. 1714-1720, 2009.
25. G. Bugnon, G. Parascandolo, T. Söderström, P. Cuony, M. Despeisse, S. Hänni, J. Holovskú, F. Meillaud, and C. Ballif, "A new view of microcrystalline silicon: The role of plasma processing in achieving a dense and stable absorber material for photovoltaic applications," Adv. Functional Mater., vol. 22, pp. 3665-3671, 2012.
26. M. Despeisse, G. Bugnon, A. Feltrin, M. Stueckelberger, P. Cuony, F. Meillaud, A. Billet, and C. Ballif, "Resistive interlayer for improved performance of thin film silicon solar cells on highly textured substrate," Appl. Phys. Lett., vol. 96, p. 073507, 2010.