Dynamic characterization of tunable RF MEMS products

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2014, Pages 1253-1256

  Dereus, Dana ^a   Cunningham, Shawn ^a   Natarajan, Saravana ^a   Morris, Art ^a   Hilbert, Jeff ^a  

^a Wispry Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; FREQUENCY RESPONSE; WIRELESS TELECOMMUNICATION SYSTEMS;

DYNAMIC BEHAVIORS; DYNAMIC CHARACTERIZATION; MEASUREMENT AND SIMULATION; RF PERFORMANCE; RF-MEMS; SWITCHING TIME; TUNABLE CAPACITORS; WIRELESS COMMUNICATIONS;

MEMS;

EID: 84899001240     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2014.6765876     Document Type: Conference Paper

References (14)

1. J. Hilbert, "RF-MEMS for Wireless Communications", IEEE Comm. Magazine, vol. 46, pp. 68-74, 2008.
2. J. R. De Luis, et al., "A Novel Frequency Control Loop for Tunable Notch Filters", IEEE Trans. Microwave Theory and Tech., vol. 59, pp. 2265-2274, 2011.
3. J. R. De Luis, et al., "A Tunable Asymmetric Notch Filter using RFMEMS", in Digest of IEEE MTT-S Microwave Symp., Anaheim, CA, 23-28 May, 2010, pp. 1146-1149.
4. J. Hung, L. Dussopt, and G. Rebeiz, "Distributed 2-and 3-bit W-band MEMS Phase Shifters on Glass Substrates", IEEE Trans. Microw. Theory Tech., vol. 52, pp. 600-606, 2004.
5. J. R. De Luis, et al., "Tunable Antenna Systems for Wireless Transceivers", Intl. Symp. Antennas and Propagation (APSURSI), Spokane, WA, 3-8 July, 2011, pp. 730-733.
6. A. S. Morris, "High Performance Tuners for Handsets", in Digest of IEEE MTT-S Microwave Symp., Baltimore, MD, 5-10 June, 2011, pp. 1-4.
7. M. Innocent, et al., "Analysis of the Nonlinear Behavior of a MEMS Variable Capacitor", Proc. Modeling and Simulation of Microsystems, San Juan, PR, 2002, pp. 234-237.
8. M. Innocent, et al., "Measurement of the Nonlinear Behavior of a MEMS Variable Capacitor", Proc. 17th IEEE Intl. Conf. on MEMS, Maastricht, The Netherlands, 25-29 Jan., 2004, pp. 773-776.
9. D. Girbau, A. Lazaro, and L. Pradell, "Characterization of Dynamics in On-Wafer RF MEMS Variable Capacitors using RF Measurement Techniques", IEEE Trans. on Microwave Theory and Tech., vol. 52, pp. 2627-2633, 2004.
10. L. Dussopt and G. M. Rebeiz, "Intermodulation Distortion and Power Handling in RF MEMS Switches, Varactors, and Tunable Filters", IEEE Trans. Microw. Theory and Tech., vol. 51, pp. 1247-1256, 2003.
11. K. Chen, et al., "Antibiased Electrostatic RF MEMS Varactors and Tunable Filters", IEEE Trans. on Microwave Theory and Tech., vol. 58, pp. 3971-3980, 2010.
12. A. K. Stamper, et al., "Planar MEMS RF Capacitor Integration", in Digest Tech. Papers Transducers 2011 Conference, Beijing, 5-9 June, 2011, pp. 1803-1806.
13. D. R. DeReus, et al., "Tunable Capacitor Series/Shunt Design for Integrated Tunable Wireless Front End Applications", MEMS 2011, Cancun, MX, 23-27 June, 2011, pp. 805-808.
14. S. P. Natarajan, et al., "CMOS Integrated Digital RF MEMS Capacitors", Si Mono. Int. Circuits in RF Sys. (SiRF), Phoenix, AZ, 16-19 January, 2011, pp. 173-176.