About the influence of double bonds in the APPECVD of acrylate-like precursors: A mass spectrometry study of the plasma phase

Plasma Processes and Polymers

Volumn 11, Issue 4, 2014, Pages 335-344

  Nisol, Bernard ^a   Arnoult, Grégory ^a   Bieber, Thomas ^a   Kakaroglou, Alexandros ^b   De Graeve, Iris ^b   Van Assche, Guy ^b   Terryn, Herman ^b   Reniers, François ^a  

^a UNIVERSITÉ LIBRE DE BRUXELLES   (Belgium)

^b VRIJE UNIVERSITEIT BRUSSEL   (Belgium)

Author keywords

acrylates; atmospheric pressure; mass spectrometry (MS); plasma enhanced chemical vapor deposition (PECVD); polymerization

Indexed keywords

ATMOSPHERIC PRESSURE; CARBON DIOXIDE; MASS SPECTROMETRY; OLIGOMERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYMERIZATION; VAPORS;

ACRYLATES; DOUBLE BONDS; GASPHASE; IN-SITU CHARACTERIZATION; PLASMA SYNTHESIS;

PLASMAS;

EID: 84898927422     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.201300176     Document Type: Article

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