Near-field nanoimprinting using colloidal monolayers

Optics Express

Volumn 22, Issue 7, 2014, Pages 8226-8233

  David, Christin ^a   Kühler, Paul ^a,b   De Abajo, F Javier Garćia ^c,d   Siegel, Jan ^a  

^a CSIC   (Spain)

^b UNIVERSITY OF MUNICH   (Germany)

^c ICFO INSTITUT DE CIENCIES FOTONIQUES   (Spain)

^d INSTITUCIÓ CATALANA DE RECERCA I ESTUDIS AVANÇATS ICREA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

GERMANIUM; NANOIMPRINT LITHOGRAPHY;

COLLOIDAL MONOLAYERS; DIFFERENT SUBSTRATES; EXPERIMENTAL VERIFICATION; ILLUMINATION CONDITIONS; LARGE-SCALE FABRICATION; MULTIPLE SCATTERING EFFECT; POLYSTYRENE SPHERES; SMALL DISPLACEMENT;

MONOLAYERS;

EID: 84898604789     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.22.008226     Document Type: Article

References (23)

1. E. Mcleod and C. B. Arnold, "Subwavelength direct-write nanopatterning using optically trapped microspheres", Nat. Nano 3, 413 (2008).
2. X. A. Zhang, J. Elek, and C.-H. Chan, "Three-Dimensional Nanolithography Using Light Scattering from Colloidal Particles", ACS Nano 7(7), 6212-6218 (2013).
3. A. Sundaramurthy, P. J. Schuck, N. R. Conley, D. P. Fromm, G. S. Kino, and W. E. Moerner, "Toward Nanometer-Scale Optical Photolithography: Utilizing the Near-Field of Bowtie Optical Nanoantennas", Nano Lett. 6, 355 (2006).
4. I. Martín-Fabiani, J. Siegel, S. Riedel, J. Boneberg, T. A. Ezquerra, A. Nogales, "Nanostructuring Thin Polymer Films with Optical Near Fields", ACS Appli. Mater. Interfaces 5(21), 11402-11408 (2013).
5. O. Watanabe, T. Ikawa, M. Hasegawa, M. Tsuchimori, and Y. Kawata, "Nanofabrication induced by near-field exposure from a nanosecond laser pulse", Appl. Phys. Lett. 79, 1366-1368 (2001).
6. Z. B. Wang, M. H. Hong, B. S. Luk'yanchuk, Y. Lin, Q. F. Wang, and T. C. Chong, "Angle effect in laser nanopatterning with particle-mask", J Appl. Phys. 96, 6845 (2004).
7. D. Brodoceanu, L. Landström, and D. Baüerle, "Laser-induced nanopatterning of silicon with colloidal monolayers", Appl. Phys. A 86, 313 (2007).
8. T. Sakai, N. Nedyalkov, and M. Obara, "Positive and negative nanohole-fabrication on glass surface by femtosecond laser with template of polystyrene particle array", J. Phys. (Paris) D: Appl. Phys. 40, 2102 (2007).
9. A. Pereira, D. Grojo, M. Chaker, P. Delaporte, D. Guay, and M. Sentis, "Laser-fabricated porous alumina membranes for the preparation of metal nanodot arrays", Small 4, 572-576 (2008).
10. R. Morarescu, L. Englert, B. Kolaric, P. Damman, R. A. L. Vallee, T. Baumert, F. Hubenthal, and F. Trager, "Tuning nanopatterns on fused silica substrates: a theoretical and experimental approach", J. Mater. Chem 21, 4076 (2011).
11. L. Li, W. Guo, Z. B. Wang, Z. Liu, D. J. Whitehead, and B. Luk'yankchuk, "Large-area laser nano-texturing with user-defined patterns", J. Micromech. Microeng. 19, 054002 (2009).
12. Z. B. Wang, W. Guo, B. Luk'yankchuk, D. J. Whitehead, L. Li, and Z. Liu, "Optical Near-field Interaction between Neighbouring Micro/Nano- Particles", J. Laser Micro/Nanoeng. 3(1), 14-18 (2008).
13. T. Miyanishi, Y. Tsunoi, M. Terakawa, and M. Obara, "High-intensity near-field generation for silicon nanoparticle arrays with oblique irradiation for large-area high-throughput nanopatterning", Appl. Phys. B 107, 323-332 (2012).
14. P. Kühler, F. J. García De Abajo, J. Solis, M. Mosbacher. P. Leiderer, C. Afonso, and J. Siegel, "Imprinting the Optical Near Field of Microstructures with Nanometer Resolution", Small 5, 1825 (2009).
15. 3 pseudobinary amorphous thin films for an optical disk memory", J. Appl. Phys. 69, 2849 (1991).
16. J. Siegel, A. Schropp, J. Solis, C. N. Afonso, and M. Wuttig, "Rewritable phase-change optical recording in Ge2Sb2Te5 films induced by picosecond laser pulses", Appl. Phys. Lett. 84, 2250 (2004).
17. 5 films upon nano- and femtosecond laser pulse irradiation", J. Appl. Phys. 103, 023516 (2008).
18. P. Kühler, F. J. García De Abajo, P. Leiprecht, A. Kolloch, J. Solis, P. Leiderer, and J. Siegel, "Quantitative imaging of the optical near field", Opt. Express 20, 22063-22078 (2012).
19. 5", J. Appl. Phys. 97, 18 (2005).
20. N. Stefanou, V. Yannopapas, and A. Medinos, "Heterostructures of photonic crystals: frequency bands and transmission coefficients", Nat. Nano 3, 413 (2008).
21. F. J. García De Abajo, "Multiple scattering of radiation in clusters of dielectrics", Nat. Nano 3, 413 (2008).
22. N. Stefanou, V. Yannopapas, and A. Medinos, "MULTEM 2: A new version of the program for transmission and band-structure calculations of photonic crystals", Nat. Nano 3, 413 (2008).
23. R. Sainidou, N. Stefanou, I. Psarobas, and A. Medinos, "A layer-multiple-scattering method for phononic crystals and heterostructures of such", Nat. Nano 3, 413 (2008).