Effective passivation of large area black silicon solar cells by SiO 2 / SiN x:H stacks

International Journal of Photoenergy

Volumn 2014, Issue , 2014, Pages

  Zhao, Zengchao ^a   Zhang, Bingye ^a   Li, Ping ^a   Guo, Wan ^a   Liu, Aimin ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CONVERSION EFFICIENCY; INTERFACE STATES; PASSIVATION; QUANTUM THEORY; SEMICONDUCTOR DOPING; SILICA; SILICON NITRIDE; SILICON OXIDES; SILICON SOLAR CELLS; SILVER NANOPARTICLES;

BLACK SILICON; BLACK SILICON SOLAR CELLS; H-PASSIVATION; HIGHER EFFICIENCY; INTERNAL QUANTUM EFFICIENCY; PASSIVATION FILM; PERFORMANCE; SIO 2; STACK FILMS; SURFACE PASSIVATION;

SILICON WAFERS;

EID: 84897524339     PISSN: 1110662X     EISSN: 1687529X     Source Type: Journal    
DOI: 10.1155/2014/683654     Document Type: Article

References (20)

1. Srivastava S. K., Kumar D., Singh P. K., Kar M., Kumar V., Husain M., Excellent antireflection properties of vertical silicon nanowire arrays. Solar Energy Materials and Solar Cells 2010 94 9 1506 1511 2-s2.0-77955419443 10.1016/j.solmat.2010.02.033
2. Peng K., Xu Y., Wu Y., Yan Y., Lee S.-T., Zhu J., Aligned single-crystalline Si nanowire arrays for photovoltaic applications. Small 2005 1 11 1062 1067 2-s2.0-32244445499 10.1002/smll.200500137 (Pubitemid 43951675)
3. Moreno M., Daineka D., Roca i Cabarrocas P., Plasma texturing for silicon solar cells: from pyramids to inverted pyramids-like structures. Solar Energy Materials and Solar Cells 2010 94 5 733 737 2-s2.0-77949653476 10.1016/j.solmat.2009.12.015
4. Xia Y., Liu B., Liu J., Shen Z., Li C., A novel method to produce black silicon for solar cells. Solar Energy 2011 85 7 1574 1578 2-s2.0-79956150228 10.1016/j.solener.2011.03.012
5. Xia Y., Liu B., Zhong S., Li C., X-ray photoelectron spectroscopic studies of black silicon for solar cell. Journal of Electron Spectroscopy and Related Phenomena 2012 184 11-12 589 592 2-s2.0-84855776198 10.1016/j.elspec. 2011.10.004
6. Cao Y., Liu A., Li H., Liu Y., Qiao F., Hu Z., Sang Y., Fabrication of silicon wafer with ultra low reflectance by chemical etching method. Applied Surface Science 2011 257 17 7411 7414 2-s2.0-79957468945 10.1016/j.apsusc.2011. 02.102
7. Kumar D., Srivastava S. K., Singh P. K., Husain M., Kumar V., Fabrication of silicon nanowire arrays based solar cell with improved performance. Solar Energy Materials and Solar Cells 2011 95 1 215 218 2-s2.0-77957668348 10.1016/j.solmat.2010.04.024
8. Yuan H.-C., Yost V. E., Page M. R., Stradins P., Meier D. L., Branz H. M., Efficient black silicon solar cell with a density-graded nanoporous surface: optical properties, performance limitations, and design rules. Applied Physics Letters 2009 95 12 2-s2.0-70349653372 10.1063/1.3231438 123501
9. Shen M. Y., Crouch C. H., Carey J. E., Mazur E., Femtosecond laser-induced formation of submicrometer spikes on silicon in water. Applied Physics Letters 2004 85 23 5694 5696 2-s2.0-12844278863 10.1063/1.1828575 (Pubitemid 40162566)
10. Oh J. H., Yuan H. C., Branz H. M., An 18.2%-efficient black-silicon solar cell achieved through control of carrier recombination in nanostructures. Nature Nanotechnology 2012 7 11 743 748
11. Toor F., Branz H. M., Page M. R., Jones K. M., Yuan H.-C., Multi-scale surface texture to improve blue response of nanoporous black silicon solar cells. Applied Physics Letters 2011 99 10 2-s2.0-80052804736 10.1063/1.3636105 103501
12. Wang W. C., Lin C. W., Chen H. J., Surface passivation of efficient nanotextured black Silicon solar cells using thermal atomic layer deposition. ACS Applied Materials and Interfaces 2013 5 19 9752 9759
13. 2 produces porous silicon. Applied Physics Letters 2000 77 16 2572 2574 2-s2.0-0000107329
14. Menna P., Di Francia G., La Ferrara V., Porous silicon in solar cells: a review and a description of its application as an AR coating. Solar Energy Materials and Solar Cells 1995 37 1 13 24 2-s2.0-0029289911
15. Wang S., Yu X. Z., Fan H. T., Simple lithographic approach for subwavelength structure antireflection. Applied Physics Letters 2007 91 6 2-s2.0-34547850819 10.1063/1.2767990 061105 (Pubitemid 47247069)
16. Lin X. X., Hua X., Huang Z. G., Realization of high performance silicon nanowire based solar cells with large size. Nanotechnology 2013 24 23 235402
17. Aberle A. G., Surface passivation of crystalline silicon solar cells: a review. Progress in Photovoltaics Research and Applications 2000 8 5 473 487 (Pubitemid 32018624)
18. Duerinckx F., Szlufcik J., Defect passivation of industrial multicrystalline solar cells based on PECVD silicon nitride. Solar Energy Materials and Solar Cells 2002 72 1-4 231 246 2-s2.0-0036533157 10.1016/S0927-0248(01)00170-2 (Pubitemid 34181863)
19. Stavola M., Kleekajai S., Wen L., Peng C., Yelundur V., Rohatgi A., Carnel L., Kalejs J., IR characterization of hydrogen in crystalline silicon solar cells. Physica B 2009 404 23-24 5066 5070 2-s2.0-74349129946 10.1016/j.physb.2009.08.226
20. Jiang F., Stavola M., Rohatgi A., Kim D., Holt J., Atwater H., Kalejs J., Hydrogenation of Si from SiN x (H) films: characterization of H introduced into the Si. Applied Physics Letters 2003 83 5 931 933 2-s2.0-0041965793 10.1063/1.1598643