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Volumn 1, Issue , 2003, Pages 21-24

High-performance integrated RF-MEMS: Part 1-The process

Author keywords

[No Author keywords available]

Indexed keywords

APPLICATION FIELDS; HIGH PERFORMANCE DEVICES; MANUFACTURING INFRASTRUCTURE; ON CHIPS; RECONFIGURABLE; RF-MEMS; SINGLE PROCESS; SWITCHABLE;

EID: 84897487319     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMC.2003.1262208     Document Type: Conference Paper
Times cited : (8)

References (10)
  • 2
    • 0029543057 scopus 로고
    • A surface micro-machined miniature switch for telecommunications applications with signal frequencies from dc up to 4ghz
    • Stockholm, Sweden, June 25-29
    • J. J. Yao and M. F. Chang, "A surface micro-machined miniature switch for telecommunications applications with signal frequencies from dc up to 4GHz," Transducers 95 Eurosensors IX, Th 8th Intl. Conf. on Solid-State Sensors and Actuators, Stockholm, Sweden, June 25-29, 1995. pp. 384-387.
    • (1995) Transducers 95 Eurosensors IX, Th 8th Intl. Conf. on Solid-State Sensors and Actuators , pp. 384-387
    • Yao, J.J.1    Chang, M.F.2
  • 3
    • 0029694266 scopus 로고    scopus 로고
    • Characteristics of micro-machined switches at microwave frequencies
    • C. Goldsmith, et al., "Characteristics of micro-machined switches at microwave frequencies," 1996 IEEE MTT-S Digest, pp. 1141-1144.
    • (1996) IEEE MTT-S Digest , pp. 1141-1144
    • Goldsmith, C.1
  • 4
    • 0032296249 scopus 로고    scopus 로고
    • Micro-machined electro-mechanically tunable capacitors and their applications to rf ics
    • December
    • A. Dec, et.al., Micro-machined Electro-Mechanically Tunable Capacitors and Their Applications to RF ICs, IEEE Transactions on Microwave Theory and Techniques, Vol. 46, No. 12, December 1998.
    • (1998) IEEE Transactions on Microwave Theory and Techniques , vol.46 , Issue.12
    • Dec, A.1
  • 5
    • 0002395885 scopus 로고    scopus 로고
    • A low noise rf voltage-controlled oscillator using on-chip high-q three-dimensional coil inductor and micro-machined variable capacitor
    • Hilton Head Island, SC, June 8-11
    • D.J. Young, et.al., A Low Noise RF Voltage-Controlled Oscillator Using On-Chip High-Q Three-Dimensional Coil Inductor and Micro-machined Variable Capacitor, Proceedings of the Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island, SC, June 8-11, 1998.
    • (1998) Proceedings of the Solid-State Sensor, Actuator, and Microsystems Workshop
    • Young, D.J.1
  • 6
    • 0036687251 scopus 로고    scopus 로고
    • High q multi-layer spiral inductor on silicon chip for 5-6 ghz
    • Aug
    • F. Lihui, et al., "High Q multi-layer spiral inductor on silicon chip for 5-6 GHz," IEEE electron device letters, Vol. 23, No. 8, Aug. 2002, pp. 470-472.
    • (2002) IEEE Electron Device Letters , vol.23 , Issue.8 , pp. 470-472
    • Lihui, F.1
  • 7
    • 0036805474 scopus 로고    scopus 로고
    • CMOS-compatible surface-micro-machined suspended-spiral inductors for multi-ghz silicon rf ics
    • Oct
    • J.-B. Yoon, et al., "CMOS-compatible surface-micro-machined suspended-spiral inductors for multi-GHz silicon RF ICs," IEEE electron device letters, Vol. 23, No.10, Oct. 2002, pp. 591-593.
    • (2002) IEEE Electron Device Letters , vol.23 , Issue.10 , pp. 591-593
    • Yoon, J.-B.1
  • 8
    • 0029695732 scopus 로고    scopus 로고
    • Novel micro-machined approaches to rnmics using low-parasitic, high-performance transmission media and environments
    • L. P. B. Katehi and G. M. Rebeiz, "Novel micro-machined approaches to rnmics using low-parasitic, high-performance transmission media and environments," 1996 IEEE MTT-S Digest, pp. 1145-1148.
    • (1996) IEEE MTT-S Digest , pp. 1145-1148
    • Katehi, L.P.B.1    Rebeiz, G.M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.