The effect of a SiO2 interface layer on CPW lines and Schottky barrier diodes on HRS substrates

1998 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 1998

Volumn 1998-September, Issue , 1998, Pages 178-180

  Wu, Y ^a   Yang, S ^b   Gamble, H S ^a   Armstrong, B M ^a   Fusco, V F ^b   Stewert, J A C ^b  

^a Northern Ireland Semiconductor Research Centre   (United Kingdom)

^b QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DIODES; MONOLITHIC INTEGRATED CIRCUITS; SILICA; SILICON OXIDES; SUBSTRATES;

CPW LINE; DISSIPATION LOSS; HIGH RESISTIVITY; INTERFACE LAYER; LEAKAGE CURRENT EFFECT; LINE CONDUCTORS; SCHOTTKY DIODES;

SCHOTTKY BARRIER DIODES;

EID: 84897532794     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMIC.1998.750216     Document Type: Conference Paper

References (6)

1. AC Reyes, SM El-Ghazaby, S Dorn, M Dydyk and DK Schroder, "Silicon as a Microwave Substrate", 1994 IEEE M7T-S Digest, pp 1759-1762.
2. AC Reyes, SM El-Ghazaby, S Dorn, M Dydyk, DK Schroder and H Patterson, "Coplanar Waveguides and Microwave Inductors on Silicon Substrates", IEEE Transactions on Microwave Theory and Techniques, September 1995, pp 2016-2022.
3. ZR Hu, VF Fusco, Y Wu, HS Gamble, BM Armstrong and JAC Stewart, "Contact Effects on RF Loss of CPW High Resistivity Silicon Lines", 1996 IEE MTT-S Digest, pp 299-302.
4. S Yang, AR Hu, NJ Buchanan, VF Fusco, JAC Stewart, Y Wy, BM Armstrong, GA Armstrong and HS Gamble, "Characteristics of Trenched Coplanar Waveguide for High Resistivity Si MMIC Applications," Special Issue on Microwave Circuits on Silicon Substrates, IEEE Transactions on Microwave Theory and Techniques, May 1988, pp 623-631.
5. Y Wu, BM Armstrong, HS Gamble, AR Hu, Q Chen, S Yang, VF Fusco and JAC Stewart, "Microwave PtSi-Si Schottky Barrier Detector Diode Fabrication Using an Implanted active Layer on HRS Substrate", ibid, 1998, pp 641-646.
6. C Rheinfelder, K Strohm, F Beisswanger, J Gerdes, FJ Schmuckle, JF Luy and W Heinrich, "26GHz Coplanar SiGe MMICS", 1996 IEEE M7T-S Digest, pp 273-276.