Measured attenuation of coplanar waveguide on CMOS grade silicon substrates with polyimide interface layer

Electronics Letters

Volumn 34, Issue 13, 1998, Pages 1327-1329

  Ponchak, G E ^a   Katehi, L P B ^b  

^a NASA GLENN RESEARCH CENTER   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTROMAGNETIC WAVE ATTENUATION; POLYIMIDES; SILICON WAFERS;

PROPAGATION CONSTANT;

WAVEGUIDES;

EID: 0032090515     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19980840     Document Type: Article

References (6)

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2. SUEMATSU, N., ONO, M., KUBO, S., IYAMA, Y., and ISHIDA, O.: 'L-band internally matched Si-MMIC front-end', IEEE Trans. Microw. Theory Tech., 1996, MTT-44, (12), pp. 2375-2378
3. CASE, M., MAAS, S.A., LARSON, L., RENSCH, D., HARAME, D., and MEYERSON, B.: 'An X-band monolithic active mixer in SiGe HBT technology'. 1996 IEEE MTT-S Int. Microwave Symposium Dig., San Francisco, CA, 17-21 June 1996, pp. 655-658
4. GRUHLE, A., and SCHUPPEN, A.: 'Recent advances with SiGe heterojunction bipolar transistors', Thin Solid Films, 1997, 294. pp. 246-249
5. PONCHAK, G.E., DOWNEY, A.N., and KATEHI, L.P.B.: 'High frequency interconnects on silicon substrates'. 1997 IEEE Radio Frequency Integrated Circuits Symp. Dig., Denver, CO, 8-11 June 1997, pp. 101-104
6. WILLIAMS, D.F., MARKS, R.B., and DAVIDSON, A.: 'Comparison of on-wafer calibrations'. 38th ARFTG Conf. Dig., San Diego, CA, 5-6 December 1991