Amorphous and nanocrystalline magnetron sputtered CuO thin films deposited on low temperature cofired ceramics substrates for gas sensor applications

IEEE Sensors Journal

Volumn 14, Issue 5, 2014, Pages 1600-1607

  Rydosz, Artur ^a  

^a AGH UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Poland)

Author keywords

CuO films; Gas sensor applications; low temperature cofired ceramics; magnetron sputtering

Indexed keywords

AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; CARBON MONOXIDE; CHEMICAL SENSORS; GAS DETECTORS; MAGNETRON SPUTTERING; MAGNETRONS; NITROGEN OXIDES; SCANNING ELECTRON MICROSCOPY; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

LONG TERM STABILITY; LONG-TERM STABILITY TEST; LOW TEMPERATURE CO-FIRED CERAMICS; NANOCRYSTALLINE CUO; NANOCRYSTALLINES; NITROGEN DIOXIDES; SENSOR APPLICATIONS; SPUTTERING TECHNOLOGY;

GOLD;

EID: 84897477011     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2014.2301031     Document Type: Article

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