Microsystem in LTCC technology for measurements of gas concentration in a sub-ppm range

Procedia Engineering

Volumn 5, Issue , 2010, Pages 1244-1247

  Pisarkiewicz, Tadeusz ^a   Maziarz, Wojciech ^a   Rydosz, Artur ^a   Mueller, Jens ^b   Mach, Matthias ^b  

^a AGH UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Poland)

^b ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Adsorbents; Gas preconcentration; Gas sensors; LTCC microsystems

Indexed keywords

ADSORBENTS; ALUMINA; CERAMIC MATERIALS; CHEMICAL SENSORS; SUBSTRATES; TEMPERATURE;

ALUMINA PLATES; GAS CONCENTRATION; LOW-TEMPERATURE CO-FIRED CERAMICS; LTCC TECHNOLOGY; MEASUREMENTS OF; OXIDE SENSORS; PRE-CONCENTRATION; SENSOR SUBSTRATES;

MICROSYSTEMS;

EID: 78650604411     PISSN: None     EISSN: 18777058     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2010.09.338     Document Type: Conference Paper

References (10)

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