Distribution of nanoscale nuclei in the amorphous dome of a phase change random access memory

Applied Physics Letters

Volumn 104, Issue 7, 2014, Pages

  Lee, Bong Sub ^a,c   Darmawikarta, Kristof ^a,d   Raoux, Simone ^b,e   Shih, Yen Hao ^b,f   Zhu, Yu ^b   Bishop, Stephen G ^a   Abelson, John R ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

^c Invensas Corporation   (United States)

^d INTEL CORPORATION   (United States)

^e HAHN MEITNER INSTITUT   (Germany)

^f MACRONIX INTERNATIONAL CO LTD   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIMONY COMPOUNDS; GERMANIUM COMPOUNDS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; NANOTECHNOLOGY; POPULATION STATISTICS; TELLURIUM COMPOUNDS;

AS-DEPOSITED STATE; DATA RETENTION; NANOSCALE CRYSTALS; NUCLEATION THEORY; PHASE CHANGE RANDOM ACCESS MEMORY; QUENCHED STATE; TEST STRUCTURE; THERMAL DESIGNS;

PHASE CHANGE MEMORY;

EID: 84897416574     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4865586     Document Type: Article

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