RF sputtered amorphous chalcogenide thin films for surface enhanced infrared absorption spectroscopy

Optical Materials Express

Volumn 3, Issue 12, 2013, Pages 2112-2131

  Verger, F ^a,b   Nazabal, V ^a   Colas, F ^c   Nemec P ^b   Cardinaud, C ^d   Baudet, E ^a   Chahal, R ^a   Rinnert, E ^c   Boukerma, K ^c   Peron, I ^a   Deputier, S ^a   Guilloux Viry, M ^a   Guin, J P ^a   Lhermite, H ^a   Moreac, A ^e   Compere C ^c   Bureau, B ^a  

^a UNIVERSITÉ DE RENNES 1   (France)

^b UNIVERSITY OF PARDUBICE   (Czech Republic)

^c IFREMER   (France)

^d UNIVERSITÉ DE NANTES   (France)

^e UNIVERSITÉ DE RENNES 1   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHALCOGENIDES; FABRICATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GERMANIUM; GOLD; INFRARED ABSORPTION; LIGHT ABSORPTION; METAL NANOPARTICLES; OPTICAL WAVEGUIDES; PLANAR WAVEGUIDES; SELF ASSEMBLED MONOLAYERS; STRETCHING; SURFACES; THIN FILMS;

AMORPHOUS CHALCOGENIDE; DEPOSITION PARAMETERS; DIRECT CURRENT SPUTTERING; RADIO-FREQUENCY-MAGNETRON SPUTTERING; SURFACE ENHANCED INFRARED ABSORPTION SPECTROSCOPY; SURFACE PLASMON EFFECTS; SURFACE-ENHANCED INFRARED ABSORPTIONS; TRANSPARENT THIN FILM;

SEMICONDUCTING SELENIUM COMPOUNDS;

EID: 84896977980     PISSN: None     EISSN: 21593930     Source Type: Journal    
DOI: 10.1364/OME.3.002112     Document Type: Article

References (50)

1. C. McDonagh, C. S. Burke, and B. D. MacCraith, "Optical chemical sensors," Chem. Rev. 108(2), 400-422 (2008).
2. M. Zourob and A. Lakhtakia, Optical Guided-wave Chemical and Biosensors I (Springer, 2010).
3. B. H. Stuart, Infrared Spectroscopy: Fundamentals and Applications (Wiley, 2004).
4. K. Nishikida, E. Nishio, and R. W. Hannah, Selected Applications of Modern FT-IR Techniques (Kodansha, 1996).
5. A. Barth, "Infrared spectroscopy of proteins," Biochim. Biophys. Acta-Bioenergetics 1767(9), 1073-1101 (2007).
6. B. B. Lahiri, S. Bagavathiappan, T. Jayakumar, and J. Philip, "Medical applications of infrared thermography: A review," Infrared Phys. Technol. 55(4), 221-235 (2012).
7. K. D. Shepherd and M. G. Walsh, "Infrared spectroscopy - enabling an evidence-based diagnostic surveillance approach to agricultural and environmental management in developing countries," J. Near Infrared Spec. 15(2), 1-19 (2007).
8. R. H. Wilson and H. S. Tapp, "Mid-infrared spectroscopy for food analysis: recent new applications and relevant developments in sample presentation methods," Trac-Trend. Anal. Chem. 18, 85-93 (1999).
9. M. A. Schmidt, D. Y. Lei, L. Wondraczek, V. Nazabal, and S. A. Maier, "Hybrid nanoparticle-microcavity-based plasmonic nanosensors with improved detection resolution and extended remote-sensing ability," Nat. Commun 3, 1108 (2012).
10. B. J. Eggleton, B. Luther-Davies, and K. Richardson, "Chalcogenide photonics," Nat. Photonics 5, 141-148 (2011).
11. F. Charpentier, V. Nazabal, J. Troles, Q. Coulombier, L. Brilland, C. Boussard-Pledel, P. Nemec, H. Lhermite, J. Charrier, F. Smektala, M. Frumar, K. Le Pierres, N. Thybaud, and B. Bureau, "Infrared optical sensor for CO2 detection," in Optical Sensors, F. Baldini, J. Homola, and R. A. Lieberman, eds., vol. 7356, (SPIE, 2009), pp. 735610.
12. M. L. Anne, J. Keirsse, V. Nazabal, K. Hyodo, S. Inoue, C. Boussard-Pledel, H. Lhermite, J. Charrier, K. Yanakata, O. Loreal, J. Le Person, F. Colas, C. Compère, and B. Bureau, "Chalcogenide glass optical waveguides for infrared biosensing," Sensors 9(9), 7398-7411 (2009).
13. J. Charrier, M.-L. Brandily, H. Lhermite, K. Michel, B. Bureau, F. Verger, and V. Nazabal, "Evanescent wave optical micro-sensor based on chalcogenide glass," Sensor. Actuat. B-Chem. 173, 468-476 (2012).
14. J. J. Hu, V. Tarasov, A. Agarwal, L. Kimerling, N. Carlie, L. Petit, and K. Richardson, "Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor," Opt. Express 15(5), 2307-2314 (2007).
15. M. Guignard, V. Nazabal, F. Smektala, J. L. Adam, O. Bohnke, C. Duverger, A. Moréac, H. Zeghlache, A. Kudlinski, G. Martinelli, and Y. Quiquempois, "Chalcogenide glasses based on germanium disulfide for second harmonic generation," Adv. Funct. Mater. 17(16), 3284-3294 (2007).
16. C. Monat, M. Spurny, C. Grillet, L. O'Faolain, T. F. Krauss, B. J. Eggleton, D. Bulla, S. Madden, and B. Luther-Davies, "Third-harmonic generation in slow-light chalcogenide glass photonic crystal waveguides," Opt. Lett. 36(15), 2818-2820 (2011).
17. C. C. Huang, D. W. Hewak, and J. V. Badding, "Deposition and characterization of germanium sulphide glass planar waveguides," Opt. Express 12(11), 2501-2506 (2004).
18. J. M. Gonzalez-Leal, A. Ledesma, A. M. Bernal-Oliva, R. Prieto-Alcon, E. Marquez, J. A. Angel, and J. Carabe, "Optical properties of thin-film ternary Ge10As15Se75 chalcogenide glasses," Mater. Lett. 39(4), 232-239 (1999).
19. L. Tichý, H. Ticha, P. Nagels, R. Callaerts, R. Mertens, and M. Vlcek, "Optical properties of amorphous As-Se and Ge-As-Se thin films," Mater. Lett. 39(2), 122-128 (1999).
20. J. Charrier, M. L. Anne, H. Lhermite, V. Nazabal, J. P. Guin, F. Charpentier, T. Jouan, F. Henrio, D. Bosc, and J. L. Adam, "Sulphide GaxGe25-xSb10S65(x=0,5) sputtered films: Fabrication and optical characterizations of planar and rib optical waveguides," J. Appl. Phys. 104(7), 073110 (2008).
21. V. Nazabal, F. Charpentier, J.-L. Adam, P. Nemec, H. Lhermite, M.-L. Brandily-Anne, J. Charrier, J.-P. Guin, and A. Moréac, "Sputtering and pulsed laser deposition for near- and mid-infrared applications: A comparative study of Ge25Sb10S65 and Ge25Sb10Se65 amorphous thin films," Int. J. Appl. Ceram. Tec. 8(5), 990-1000 (2011).
22. M. Osawa and M. Ikeda, "Surface-enhanced infrared absorption of p-nitrobenzoic acid deposited on silver island films: contributions of electromagnetic and chemical mechanisms," J. Phys. Chem. 95(24), 9914-9919 (1991).
23. J. M. Delgado, J. M. Orts, and A. Rodes, "A comparison between chemical and sputtering methods for preparing thin-film silver electrodes for in situ ATR-SEIRAS studies," Electrochim. Acta 52(14), 4605-4613 (2007).
24. A. Pucci, F. Neubrech, D. Weber, S. Hong, T. Toury, and M. L. de la Chapelle, "Surface enhanced infrared spectroscopy using gold nanoantennas," Phys. Status Solidi B 247(8), 2071-2074 (2010).
25. F. Neubrech, A. Pucci, T. W. Cornelius, S. Karim, A. García-Etxarri, and J. Aizpurua, "Resonant plasmonic and vibrational coupling in a tailored nanoantenna for infrared detection," Phys. Rev. Lett. 101(15), 157403 (2008).
26. A. Hartstein, J. R. Kirtley, and J. C. Tsang, "Enhancement of the infrared absorption from molecular monolayers with thin metal overlayers," Phys. Rev. Lett. 45(3), 201-204 (1980).
27. M. Osawa, "Dynamic processes in electrochemical reactions studied by surface-enhanced infrared absorption spectroscopy (SEIRAS)," Bull. Chem. Soc. Jpn. 70(12), 2861-2880 (1997).
28. T. Kamata, A. Kato, J. Umemura, and T. Takenaka, "Intensity enhancement of infrared attenuated total reflection spectra of stearic acid Langmuir-Blodgett monolayers with evaporated silver island films," Langmuir 3(6), 1150-1154 (1987).
29. F. Verger, T. Pain, V. Nazabal, C. Boussard-Plédel, B. Bureau, F. Colas, E. Rinnert, K. Boukerma, C. Compère, M. Guilloux-Viry, S. Deputier, A. Perrin, and J. P. Guin, "Surface enhanced infrared absorption (SEIRA) spectroscopy using gold nanoparticles on As2S3 glass," Sensor. Actuat. B-Chem. 175, 142-148 (2012).
30. J. Tauc, Amorphous and Liquid Semiconductors, J. Tauc ed. (Plenum, London, New York, 1974).
31. W. C. Tan, M. E. Solmaz, J. Gardner, R. Atkins, and C. Madsen, "Optical characterization of a-As2S3 thin films prepared by magnetron sputtering," J. Appl. Phys. 107(3), 033524 (2010).
32. F. Charpentier, M. Dussauze, M. Cathelinaud, G. Delaizir, E. I. Kamitsos, J. L. Adam, B. Bureau, and V. Nazabal, "Aging process of photosensitive chalcogenide films deposited by electron beam deposition," J. Alloys Compd. 509(27), 7330-7336 (2011).
33. S. Sugai, "Stochastic random network model in Ge and Si chalcogenide glasses," Phys. Rev. B 35(3), 1345-1361 (1987).
34. L. Petit, N. Carlie, K. Richardson, Y. Guo, A. Schulte, B. Campbell, B. Ferreira, and S. Martin, "Effect of the substitution of S for Se on the structure of the glasses in the system Ge0.23Sb0.07S0.70-xSex," J. Phys. Chem. Solids 66(10), 1788-1794 (2005).
35. K. Jackson, A. Briley, S. Grossman, D. V. Porezag, and M. R. Pederson, "Raman-active modes of a-GeSe2 and a-GeS2: A first-principles study," Phys. Rev. B 60(22), R14985-R14989 (1999).
36. A. M. Jurdyc, S. Zhang, F. Charpentier, H. Lhermite, J. Charrier, J. P. Guin, A. Moreac, M. Frumar, and J. L. Adam, "Optical waveguide based on amorphous Er3+-doped Ga-Ge-Sb-S(Se) pulsed laser deposited thin films," Thin Solid Films 518(17), 4941-4947 (2010).
37. K. Murase, T. Fukunaga, K. Yakushiji, T. Yoshimi, and I. Yunoki, "Investigation of stability of (Ge,Sn)-(S, or Se)4/2 cluster by vibrational-spectra," J. Non-Cryst. Solids 59-60, 883-886 (1983).
38. P. Nemec, B. Frumarova, and M. Frumar, "Structure and properties of the pure and Pr3+-doped Ge25Ga5Se70 and Ge30Ga5Se65 glasses," J. Non-Cryst. Solids 270(1-3), 137-146 (2000).
39. Z. G. Ivanova, E. Cernoskova, V. S. Vassilev, and S. V. Boycheva, "Thermomechanical and structural characterization of GeSe2-Sb2Se3-ZnSe glasses," Mater. Lett. 57(5-6), 1025-1028 (2003).
40. J. H. Baeck, T. H. Kim, H. J. Choi, K. H. Jeong, and M. H. Cho, "Phase transformation through metastable structures in atomically controlled Se/Sb multilayers," J. Phys. Chem. C 115(27), 13462-13470 (2011).
41. R. Golovchak, O. Shpotyuk, M. Iovu, A. Kovalskiy, and H. Jain, "Topology and chemical order in AsxGexSe1-2x glasses: a high-resolution X-ray photoelectron spectroscopy study," J. Non-Cryst. Solids 357(19-20), 3454-3460 (2011).
42. D. C. Sati, A. Kovalskiy, R. Golovchak, and H. Jain, "Structure of SbxGe40-xSe60 glasses around 2.67 average coordination number," J. Non-Cryst. Solids 358(2), 163-167 (2012).
43. Y. Chen, X. Shen, R. Wang, G. Wanga, S. Dai, T. Xu, and Q. Nie, "Optical and structural properties of Ge-Sb-Se thin films fabricated by sputtering and thermal evaporation," J. Alloys Compd. 548, 155-160 (2013).
44. J. Siegel, O. Lyutakov, V. Rybka, Z. Kolská, and V. Svorcík, "Properties of gold nanostructures sputtered on glass," Nanoscale Res. Lett. 6(1), 96 (2011).
45. R. C. Munoz, G. Vidal, M. Mulsow, J. G. Lisoni, C. Arenas, A. Concha, F. Mora, R. Espejo, G. Kremer, L. Moraga, R. Esparza, and P. Haberle, "Surface roughness and surface-induced resistivity of gold films on mica: Application of quantitative scanning tunneling microscopy," Phys. Rev. B 62(7), 4686-4697 (2000).
46. M. Osawa, "Surface-enhanced infrared absorption," in Near-Field Optics and Surface Plasmon Polaritons (Springer, 2001), pp. 163-187.
47. R. F. Aroca, D. J. Ross, and C. Domingo, "Surface-enhanced infrared spectroscopy," Appl. Spectrosc. 58(11), 324-338 (2004).
48. Z. J. Zhang and T. Imae, "Study of surface-enhanced infrared spectroscopy - 1. Dependence of the enhancement on thickness of metal island films and structure of chemisorbed molecules," J. Colloid Interface Sci. 233(1), 99-106 (2001).
49. E. Bjerke, Amy, Griffiths, and R. Peter, Surface-enhanced infrared absorption spectroscopy of p-nitrothiophenol on vapor-deposited platinum films (Society for Applied Spectroscopy, Frederick, MD, USA, 2002).
50. P. M. Mendes, K. L. Christman, P. Parthasarathy, E. Schopf, J. Ouyang, Y. Yang, J. A. Preece, H. D. Maynard, Y. Chen, and J. F. Stoddart, "Electrochemically controllable conjugation of proteins on surfaces," Bioconjug. Chem. 18(6), 1919-1923 (2007).