Sputtering and pulsed laser deposition for near- and mid-infrared applications: A comparative study of Ge25Sb10S 65 and Ge25Sb10Se65 amorphous thin films

International Journal of Applied Ceramic Technology

Volumn 8, Issue 5, 2011, Pages 990-1000

  Nazabal, Virginie ^a   Charpentier, Frederic ^a   Adam, Jean Luc ^a   Nemec, Petr ^b   Lhermite, Hervé ^a   Brandily Anne, Marie Laure ^a   Charrier, Joel ^c   Guin, Jean Pierre ^a   Moréac, Alain ^a  

^a UNIVERSITÉ DE RENNES 1   (France)

^b UNIVERSITY OF PARDUBICE   (Czech Republic)

^c UNIVERSITÉ DE RENNES 1   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ANTIMONY COMPOUNDS; CHALCOGENIDES; ELECTRIC LOSSES; GERMANIUM COMPOUNDS; INFRARED DEVICES; MAGNETRON SPUTTERING; PULSED LASER DEPOSITION; PULSED LASERS; REACTIVE ION ETCHING; SELENIUM COMPOUNDS; SURFACE ROUGHNESS; THIN FILMS; TOPOGRAPHY; WAVEGUIDES;

AMORPHOUS CHALCOGENIDE; AMORPHOUS CHALCOGENIDE FILMS; AMORPHOUS THIN FILMS; CHEMICAL COMPOSITIONS; COMPARATIVE STUDIES; LOW SURFACE ROUGHNESS; PULSED-LASER DEPOSITION TECHNIQUE; RADIO FREQUENCY MAGNETRON SPUTTERING;

SULFUR COMPOUNDS;

EID: 80052660295     PISSN: 1546542X     EISSN: 17447402     Source Type: Journal    
DOI: 10.1111/j.1744-7402.2010.02571.x     Document Type: Article

References (45)

1. X. H. Zhang, B. Bureau, P. Lucas, C. Boussard-Pledel, and, J. Lucas, " Glasses for Seeing Beyond Visible," Chem."Eur. J., 14 [2] 432-442 (2008).
2. 5 Thick Films for Spatial Interferometry," J. Non-Cryst. Solids, 352 [23-25] 2416-2419 (2006). (Pubitemid 43947020)
3. 3+-Doped Chalcogenide (Ga: La: S) Glass Through Photoinduced Material Modification," Appl. Phys. Lett., 81 [20] 3708-3710 (2002). (Pubitemid 35445489)
4. T. Schweizer, D. W. Hewak, B. N. Samson, and, D. N. Payne, " Spectroscopy of Potential Mid-Infrared Laser Transitions in Gallium Lanthanum Sulphide Glass," J. Lumin., 72-4 419-421 (1997). (Pubitemid 127394555)
5. 3+-Doped GeGaSbS Glasses for Mid-IR Fibre Laser Application: Synthesis and Rare Earth Spectroscopy," Opt. Mater., 31 [1] 39-46 (2008).
6. A. Zakery, and, S. R. Elliott, " Optical Properties and Applications of Chalcogenide Glasses: A Review," J. Non-Cryst. Solids, 330 [1-3] 1-12 (2003).
7. W. D. Shen, M. Cathelinaud, M. Lequime, F. Charpentier, and, V. Nazabal, " Light Trimming of a Narrow Bandpass Filter Based on a Photosensitive Chalcogenide Spacer," Opt. Express, 16 [1] 373-383 (2008).
8. J. S. Sanghera, and, I. D. Aggarwal, " Active and Passive Chalcogenide Glass Optical Fibers for IR Applications: A Review," J. Non-Cryst. Solids, 257 6-16 (1999). (Pubitemid 30501733)
9. S. R. Elliott, Physics of Amorphous Materials, 2nd edition, Longman Scientific & Technical, Essex, United Kingdom (1990).
10. M. D. Pelusi, et al,., " Applications of Highly-Nonlinear Chalcogenide Glass Devices Tailored for High-Speed All-Optical Signal Processing," IEEE J. Sel. Top. Quantum Electron., 14 [3] 529-539 (2008).
11. B. J. Eggleton, V. G. Táeed, and, B. Luther-Davies, " Chalcogenide Glass"Advanced for All-Optical Processing," Photon Spectrosc., 41 [9] 88-90, 92- 95 (2007).
12. M. Chauvet, et al,., " Kerr Spatial Solitons in Chalcogenide Waveguides," Opt. Lett., 34 [12] 1804-1806 (2009).
13. A. Ganjoo, H. Jain, C. Yu, J. Irudayaraj, and, C. G. Pantano, "Detection and Fingerprinting of Pathogens: Mid-IR Biosensor Using Amorphous Chalcogenide Films,"22nd International Conference on Amorphous and Nanocrystalline Semiconductors, Breckenridge, CO, 2757-2762, 2007.
14. C. X. Yu, A. Ganjoo, H. Jain, C. G. Pantano, and, J. Irudayaraj, " Mid-IR Biosensor: Detection and Fingerprinting of Pathogens on Gold Island Functionalized Chalcogenide Films," Anal. Chem., 78 [8] 2500-2506 (2006).
15. J. Hu, et al,., " Fabrication and Testing of Planar Chalcogenide Waveguide Integrated Microfluidic Sensor," Opt. Express, 15 [5] 2307-2314 (2007). (Pubitemid 46376893)
16. 60 Chalcogenide Glass Films by Photodoping with Silver," J. Non-Cryst. Solids, 274 [1-3] 62-68 (2000).
17. Z. G. Ivanova, K. Koughia, D. Tonchev, J. C. Pivin, and, S. O. Kasap, " Photoluminescence in Er-Implanted Amorphous Ge-S-Ga Thin Films," J. Optoelectron. Adv. Mater., 7 [3] 1271-1276 (2005). (Pubitemid 41016772)
18. C. C. Huang, and, D. W. Hewak, " High-Purity Germanium-Sulphide Glass for Optoelectronic Applications Synthesised by Chemical Vapour Deposition," Electron. Lett., 40 [14] 863-865 (2004).
19. M. Frumar, B. Frumarova, P. Nemec, T. Wagner, J. Jedelsky, and, M. Hrdlicka, " Thin Chalcogenide Films Prepared by Pulsed Laser Deposition"New Amorphous Materials Applicable in Optoelectronics and Chemical Sensors," J. Non-Cryst. Solids, 352 [6-7] 544-561 (2006). (Pubitemid 43675723)
20. 3 Chalcogenide Films," J. Opt. Soc. Am. B-Opt. Phys., 20 [9] 1844-1852 (2003).
21. 65(x=0,5) Sputtered Films: Fabrication and Optical Characterizations of Planar and Rib Optical Waveguides," J. Appl. Phys., 104 [7] (2008).
22. S. Ramachandran, and, S. G. Bishop, " Photoinduced Integrated-Optic Devices in Rapid Thermally Annealed Chalcogenide Glasses," IEEE J. Sel. Top. Quantum Electron., 11 [1] 260-270 (2005). (Pubitemid 40303999)
23. R. G. DeCorby, et al,., " High Index Contrast Waveguides in Chalcogenide Glass and Polymer," IEEE J. Sel. Top. Quantum Electron., 11 [2] 539-546 (2005). (Pubitemid 40683009)
24. J. F. Viens, et al,., " Fabrication and Characterization of Integrated Optical Waveguides in Sulfide Chalcogenide Glasses," J. Lightwave Technol., 17 [7] 1184-1191 (1999).
25. C. C. Huang, and, D. W. Hewak, " Silver-Doped Germanium Sulphide Glass Channel Waveguides Fabricated by Chemical Vapour Deposition and Photo-Dissolution Process," Thin Solid Films, 500 [1-2] 247-251 (2006). (Pubitemid 43173498)
26. D. A. Turnbull, J. S. Sanghera, N. Q. Nguyen, and, I. D. Aggarwal, " Photolithographic Fabrication of Waveguides," Am. Ceram. Soc. Bull., 82 [9] 9401-9406 (2003).
27. 3 Substrate," Appl. Phys. Lett., 90 [1] (2007).
28. 8 Stripe Waveguide with an Optical Stopping Effect by Exposure to Ultraviolet Irradiation," Appl. Phys. Lett., 88 [15] (2006).
29. Y. L. Ruan, W. T. Li, R. Jarvis, N. Madsen, A. Rode, and, B. Luther-Davies, " Fabrication and Characterization of Low Loss Rib Chalcogenide Waveguides Made by Dry Etching," Opt. Express, 12 [21] 5140-5145 (2004).
30. 55 (AMTIR-1) Planar Waveguides," Appl. Phys. Lett., 91 [1] (2007).
31. 3 Chalcogenide Waveguides for All-Optical Signal Regeneration," Opt. Express, 15 [22] 14414-14421 (2007). (Pubitemid 350071981)
32. G. D. Cody,., " The Optical Absorption Edge of a-Si:H," Semiconductors and Semimetals, Vol. 21B. ed., J. I. Pankove,. Academic, Orlando, FL, 11-79, 1984.
33. P. Nemec, A. Moreac, V. Nazabal, M. Pavlista, J. Prikryl, and, M. Frumar, " Ge-Sb-Te thin Films Deposited by Pulsed Laser: An Ellipsometry and Raman Scattering Spectroscopy Study," J. Appl. Phys., 106 [10] 103509 (2009).
34. 3 Pulsed Laser Deposited thin Films Studied by Spectroscopic Ellipsometry," J. Appl. Phys., 106 [2] 023509 (2009).
35. 3+ doped Ga-Ge-Sb-S(Se) Pulsed Laser Deposited Thin Films," Thin Solid Films, 518 4941-4947 (2010).
36. J. Tauc, (ed.), Amorphous and Liquid Semiconductors, Plenum, New York, 1974.
37. x," J. Phys. Chem. Solids, 66 [10] 1788-1794 (2005). (Pubitemid 41781738)
38. 2: A First-Principles Study," Phys. Rev. B, 60 [22] R14985-R14989 (1999).
39. x," J. Non-Cryst. Solids, 352 [50-51] 5413-5420 (2006). (Pubitemid 44754717)
40. K. Murase, T. Fukunaga, K. Yakushiji, T. Yoshimi, and, I. Yunoki, " Investigation of Stability of (Ge,Sn)-(S, or Se)4/2 Cluster by Vibrational-Spectra," J. Non-Cryst. Solids, 59-6 883-886 (1983). (Pubitemid 14580465)
41. 65 Glasses," J. Non-Cryst. Solids, 270 [1-3] 137-146 (2000).
42. x," Phys. Rev. B, 10 [12] 5134-5146 (1974).
43. S. Sugai, " Stochastic Random Network Model in Ge and Si Chlacogenide Glasses," Phys. Rev. B, 35 1345-1361 (1987).
44. I. Watanabe, S. Noguchi, and, T. Shimizu, " Study on Local Structure in Amorphous Sb-S Films by Raman Scattering," J. Non-Cryst. Solids, 58 35-40 (1983). (Pubitemid 14469497)
45. 0.6," J. Non-Cryst. Solids, 226 [1-2] 85-91 (1998). (Pubitemid 128414214)