Laser lift-off transfer printing of patterned GaN light-emitting diodes from sapphire to flexible substrates using a Cr/Au laser blocking layer

Scripta Materialia

Volumn 77, Issue , 2014, Pages 13-16

  Chun, Jaeyi ^a   Hwang, Youngkyu ^a   Choi, Yong Seok ^a   Kim, Jae Joon ^a   Jeong, Tak ^b   Baek, Jong Hyeob ^b   Ko, Heung Cho ^a   Park, Seong Ju ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b Korea Photonics Technology Institute (KOPTI)   (South Korea)

Author keywords

Flexible display; GaN based light emitting diodes; Laser lift off; Transfer printing

Indexed keywords

BLOCKING LAYERS; FLEXIBLE SUBSTRATE; GAN LIGHT-EMITTING DIODES; GAN-BASED LIGHT-EMITTING DIODES; LASER LIFT-OFF; LASER-INDUCED DAMAGE; TRANSFER PRINTING; TRANSFER YIELDS;

DIODES; FLEXIBLE DISPLAYS; GALLIUM ALLOYS; GALLIUM NITRIDE; PRINTING; SAPPHIRE;

LIGHT EMITTING DIODES;

EID: 84896695339     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2014.01.005     Document Type: Article

References (22)

1. J.Y. Tsao, M.E. Coltrin, M.H. Crawford, and J.A. Simmons Proc. IEEE 98 2010 1162
2. P. Patel MRS Bull. 69 2011 678
3. S.T. Tan, X.W. Sun, H.V. Demir, and S.P. DenBaars IEEE Photonics J. 4 2012 613
4. H.-S. Kim, E. Brueckner, J. Song, Y. Li, S. Kim, C. Lu, J. Sulkin, K. Choquette, Y. Huang, R.G. Nuzzo, and J.A. Rogers Proc. Natl. Acad. Sci. U.S.A. 108 2011 10072
5. S. Lee, K. Park, C. Huh, M. Koo, H. Yoo, S. Kim, C. Ah, G. Sung, and K. Lee Nano Energy 1 2012 145
6. T.-I. Kim, Y.H. Jung, J. Song, D. Kim, Y. Li, H.-S. Kim, I.-S. Song, J.J. Wierer, H.A. Pao, Y. Huang, and J.A. Rogers Small 8 2012 1643
7. J. Chun, Y. Hwang, Y.S. Choi, T. Jeong, J.H. Baek, H.C. Ko, and S.J. Park IEEE Photonics Technol. Lett. 24 2012 2115
8. S.H. Lee, S.Y. Park, and K. Lee Proc. SPIE 8460 2012 846011
9. Y. Jung, S.H. Kim, J. Kim, X. Wang, F. Ren, S.J. Pearton, and J. Kim Appl. Phys. Lett. 100 2012 231113
10. S.-I. Park, Y. Xiong, R.-H. Kim, P. Elvikis, M. Meitl, D.-H. Kim, J. Wu, J. Yoon, C.-J. Yu, Z. Liu, Y. Huang, K.-C. Hwang, P. Ferreira, X. Li, K. Choquette, and J.A. Rogers Science 325 2009 977
11. D.-H. Kim, N. Lu, R. Ghaffari, Y.-S. Kim, S.P. Lee, L. Xu, J. Wu, R.-H. Kim, J. Song, Z. Liu, J. Viventi, B.D. Graff, B. Elolampi, M. Mansour, M.J. Slepian, S. Hwang, J.D. Moss, S.-M. Won, Y. Huang, B. Litt, and J.A. Rogers Nat. Mater. 10 2011 316
12. R.-H. Kim, H. Tao, T.-I. Kim, Y. Zhang, S. Kim, B. Panilaitis, M. Yang, D.-H. Kim, Y.H. Jung, B.H. Kim, Y. Li, Y. Huang, F.G. Omenetto, and J.A. Rogers Small 8 2012 2812
13. W.S. Wong, T. Sands, and N.W. Cheung Appl. Phys. Lett. 72 1998 599
14. W.S. Wong, T. Sands, N.W. Cheung, M. Kneissl, D.P. Bour, P. Mei, L.T. Romano, and N.M. Johnson Appl. Phys. Lett. 75 1999 1360
15. C.F. Chu, F.I. Lai, J.T. Chu, C.C. Yu, C.F. Lin, H.C. Kuo, and S.C. Wang J. Appl. Phys. 95 2004 3916
16. X. Zhang, S.S. Chu, J.R. Ho, and C.P. Grigoropoulos Appl. Phys. A 64 1997 545
17. S.K. Lee, and S.J. Na Appl. Phys. A 68 1999 417
18. A. Billeb, W. Grieshaber, D. Stocker, E.F. Schubert, and R.F. Karlicek Appl. Phys. Lett. 70 1997 2790
19. C.M.A. Lopes, and M.I. Felisberti Polym. Test 23 2004 637
20. Y. Xi, J.Q. Xi, T. Gessmann, J.M. Shah, J.K. Jim, E.F. Schubert, A.J. Fischer, M.H. Crawford, K.H.A. Bogart, and A.A. Allerman Appl. Phys. Lett. 86 2005 031907
21. T. Zhou, X. Wang, X. Liu, and D. Xiong Carbon 48 2010 1171
22. Y. Jung, S.H. Kim, J. Kim, X. Wang, F. Ren, K.J. Choi, and S.J. Pearton J. Vac. Sci. Technol. A 30 2012 050605