Laser lift-off of GaN thin film and its application to the flexible light emitting diodes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8460, Issue , 2012, Pages

  Lee, Seung Hyun ^a   Park, So Young ^a   Lee, Keon Jae ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Carrier substrate; Flexible GaN LED; Laser lift off; Polyimide; SU 8; Thermal release tape

Indexed keywords

BEAM CONDITIONS; CARRIER SUBSTRATE; GAN LIGHT-EMITTING DIODES; GAN THIN FILMS; LASER LIFT-OFF; LASER LIFT-OFF TECHNOLOGIES; LIGHTING APPLICATIONS; NON-WETTING; PLASTIC SUBSTRATES; POLYIMIDE SUBSTRATE; SAPPHIRE SUBSTRATES; SAPPHIRE WAFER; SU-8; THERMAL RELEASE; TRANSFER PROCESS; XECL LASER;

ELECTRIC PROPERTIES; GALLIUM NITRIDE; LASER BEAMS; LASERS; MEDICAL NANOTECHNOLOGY; POLYIMIDES; SAPPHIRE; SUBSTRATES;

LIGHT EMITTING DIODES;

EID: 84872104365     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.964095     Document Type: Conference Paper

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