Highly piezoelectric co-doped AlN thin films for bulk acoustic wave resonators

IEEE International Ultrasonics Symposium, IUS

Volumn , Issue , 2013, Pages 1382-1385

  Yokoyama, Tsuyoshi ^a   Iwazaki, Yoshiki ^a   Onda, Yousuke ^a   Nishihara, Tokihiro ^a   Ueda, Masanori ^a  

^a TAIYO YUDEN CO LTD   (Japan)

Author keywords

AlN; Doping element; Electro mechanical coefficient; Piezoelectric constant

Indexed keywords

EID: 84894320902     PISSN: 19485719     EISSN: 19485727     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2013.0351     Document Type: Conference Paper

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