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Volumn , Issue , 2013, Pages 1382-1385

Highly piezoelectric co-doped AlN thin films for bulk acoustic wave resonators

Author keywords

AlN; Doping element; Electro mechanical coefficient; Piezoelectric constant

Indexed keywords


EID: 84894320902     PISSN: 19485719     EISSN: 19485727     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2013.0351     Document Type: Conference Paper
Times cited : (10)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.