A hybrid silicon-parylene neural probe with locally flexible regions

Sensors and Actuators, B: Chemical

Volumn 195, Issue , 2014, Pages 416-422

  Kim, Eric G R ^a   John, Jessin K ^a   Tu, Hongen ^a   Zheng, Qinglong ^a   Loeb, Jeffrey ^b   Zhang, Jinsheng ^a   Xu, Yong ^a  

^a WAYNE STATE UNIVERSITY   (United States)

^b UNIVERSITY OF ILLINOIS AT CHICAGO   (United States)

Author keywords

Cortical electrophysiology; Flexible probes; MEMS; Neural probes

Indexed keywords

ELECTROPHYSIOLOGY; MEMS; POLYMERS; SILICON; TISSUE;

AGAROSE GEL; CLINICAL APPLICATION; FLEXIBLE NEURAL PROBE; FLEXIBLE PROBES; HYBRID SILICON; NEURAL PROBES; PARYLENES; TISSUE RESPONSE;

PROBES;

EID: 84894153001     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2014.01.048     Document Type: Article

References (41)

1. M.A.L. Nicolelis Brain-machine interfaces to restore motor function and probe neural circuits Nat. Rev. Neurosci. 4 2003 417 422 (Pubitemid 37280179)
2. J.P. Donoghue Connecting cortex to machines: recent advances in brain interfaces Nat. Neurosci. 5 2002 1085 1088 (Pubitemid 35247205)
3. A.B. Schwartz Cortical neural prosthetics Annu. Rev. Neurosci. 27 2004 487 507 (Pubitemid 39050411)
4. L.R. Hochberg, M.D. Serruya, G.M. Friehs, J.A. Mukand, M. Saleh, and A.H. Caplan et al. Neuronal ensemble control of prosthetic devices by a human with tetraplegia Nature 442 2006 164 171 (Pubitemid 44086558)
5. K.A. Moxon Multichannel electrode design: considerations for different applications M.A.L. Nicolelis, Methods for Neural Ensemble Recordings 1999 CRC Press Boca Raton, FL
6. E.M. Schmidt Electrodes for many single neuron recordings M.A.L. Nicolelis, Methods for Neural Ensemble Recordings 1999 CRC Press Boca Raton, FL
7. P.K. Campbell, K.E. Jones, R.J. Huber, K.W. Horch, and R.A. Normann A silicon-based, 3-dimensional neural interface - Manufacturing processes for an intracortical electrode array IEEE Trans. Biomed. Eng. 38 1991 758 768
8. R.A. Normann, E.M. Maynard, P.J. Rousche, and D.J. Warren A neural interface for a cortical vision prosthesis Vision Res. 39 1999 2577 2587 (Pubitemid 29197303)
9. K.D. Wise Integrated sensors, MEMS, and microsystems: Reflections on a fantastic voyage Sens. Actuators A: Phys. 136 2007 39 50 (Pubitemid 46590695)
10. D.R. Kipke, W. Shain, G. Buzsaki, E. Fetz, J.M. Henderson, and J.F. Hetke et al. Advanced neurotechnologies for chronic neural interfaces: New horizons and clinical opportunities J. Neurosci. 28 2008 11830 11838
11. J. John 3-Dimensional Intracortical Neural Interface for the Study of Epilepsy 2012 Wayne State University Detroit, Michigan
12. J. John, Y.F. Li, J.S. Zhang, J.A. Loeb, and Y. Xu Microfabrication of 3D neural probes with combined electrical and chemical interfaces J. Micromech. Microeng. 21 2011 105011
13. P.J. Rousche, and R.A. Normann Chronic recording capability of the Utah Intracortical Electrode Array in cat sensory cortex J. Neurosci. Methods 82 1998 1 15 (Pubitemid 28335467)
14. J.C. Williams, R.L. Rennaker, and D.R. Kipke Long-term neural recording characteristics of wire microelectrode arrays implanted in cerebral cortex Brain Res. Protoc. 4 1999 303 313
15. M.A.L. Nicolelis, D. Dimitrov, J.M. Carmena, R. Crist, G. Lehew, and J.D. Kralik et al. Chronic, multisite, multielectrode recordings in macaque monkeys Proc. Natl. Acad. Sci. U. S. A. 100 2003 11041 11046 (Pubitemid 37140149)
16. V.S. Polikov, P.A. Tresco, and W.M. Reichert Response of brain tissue to chronically implanted neural electrodes J. Neurosci. Methods 148 2005 1 18 (Pubitemid 41423453)
17. W. He, and R.V. Bellamkonda Indwelling neural implants: strategies for contending with the in vivo environment W.M. Reichert, A Molecular Perspective on Understanding and Modulating the Performance of Chronic Central Nervous System (CNS) Recording Electrodes 2008 CRC Press Boca Raton, FL (Chapter 6)
18. P.J. Rousche, D.S. Pellinen, D.P. Pivin, J.C. Williams, R.J. Vetter, and D.R. Kipke Flexible polyimide-based intracortical electrode arrays with bioactive capability IEEE Trans. Biomed. Eng. 48 2001 361 371
19. D.P. O'Brien, T.R. Nichol, and M.G. Allen Flexible microelectrode arrays with integrated insertion devices 14th IEEE International Conference on Micro Electro Mechanical Systems, IEEE, Interlaken, Switzerland 2001 216 219
20. Y.Y. Chen, H.Y. Lai, S.H. Lin, C.W. Cho, W.H. Chao, and C.H. Liao et al. Design and fabrication of a polyimide-based microelectrode array: Application in neural recording and repeatable electrolytic lesion in rat brain J. Neurosci. Methods 182 2009 6 16
21. K.C. Cheung, P. Renaud, H. Tanila, and K. Djupsund Flexible polyimide microelectrode array for in vivo recordings and current source density analysis Biosens. Bioelectron. 22 2007 1783 1790 (Pubitemid 46185980)
22. A. Mercanzini, K. Cheung, D.L. Buhl, M. Boers, A. Maillard, and P. Colin et al. Demonstration of cortical recording using novel flexible polymer neural probes Sens. Actuators A: Phys. 143 2008 90 96 (Pubitemid 351417366)
23. S. Takeuchi, T. Suzuki, K. Mabuchi, and H. Fujita 3D flexible multichannel neural probe array J. Micromech. Microeng. 14 2004 104 107
24. B.A. Wester, R.H. Lee, and M.C. LaPlaca Development and characterization of in vivo flexible electrodes compatible with large tissue displacements J. Neural Eng. 6 2009 024002
25. T. Suzuki, K. Mabuchi, and S. Takeuchi A 3D flexible parylene probe array for multichannel neural recording 1st International IEEE EMBS Conference on Neural Engineering, IEEE, Capri Island, Italy 2003 154 156
26. Y. Kato, I. Saito, T. Hoshin, T. Suzuki, and K. Mabuchi Preliminary study of multichannel flexible neural probes coated with hybrid biodegradable polymer 28th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS'06, August 30, 2006-September 3, 2006 2006 Institute of Electrical and Electronics Engineers Inc. New York, NY, United states 660 663
27. S. Takeuchi, D. Ziegler, Y. Yoshida, K. Mabuchi, and T. Suzuki Parylene flexible neural probes integrated with microfluidic channels Lab Chip 5 2005 519 523 (Pubitemid 40676818)
28. A.E. Hess, J.R. Capadona, K. Shanmuganathan, L. Hsu, S.J. Rowan, and C. Weder et al. Development of a stimuli-responsive polymer nanocomposite toward biologically optimized, MEMS-based neural probes J. Micromech. Microeng. 21 2011 054009
29. J.P. Harris, J.R. Capadona, R.H. Miller, B.C. Healy, K. Shanmuganathan, and S.J. Rowan et al. Mechanically adaptive intracortical implants improve the proximity of neuronal cell bodies J. Neural Eng. 8 2011 066011
30. T. Ware, D. Simon, D.E. Arreaga-Salas, J. Reeder, R. Rennaker, and E.W. Keefer et al. Fabrication of responsive, softening neural interfaces Adv. Funct. Mater. 22 2012 3470 3479
31. P.J. Gilgunn, R. Khilwani, T.D.Y. Kozai, D.J. Weber, X.T. Cui, and G. Erdos et al. An ultra-compliant, scalable neural probe with molded biodissolvable delivery vehicle 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) 2012 56 59
32. D. Lewitus, K.L. Smith, W. Shain, and J. Kohn Ultrafast resorbing polymers for use as carriers for cortical neural probes Acta Biomater. 7 2011 2483 2491
33. Y. Zhong, and R.V. Bellamkonda Dexamethasone-coated neural probes elicit attenuated inflammatory response and neuronal loss compared to uncoated neural probes Brain Res. 1148 2007 15 27 (Pubitemid 46628794)
34. D.H. Szarowski, M.D. Andersen, S. Retterer, A.J. Spence, M. Isaacson, and H.G. Craighead et al. Brain responses to micro-machined silicon devices Brain Res. 983 2003 23 35 (Pubitemid 36952564)
35. C.M. George, D.R. Howard, I.L. Allan, G. Claire-Anne, E.G. Robert, and V.B. Ravi Implanted neural electrodes cause chronic, local inflammation that is correlated with local neurodegeneration J. Neural Eng. 6 2009 056003
36. K.B. Neeves, C.T. Lo, C.P. Foley, W.M. Saltzman, and W.L. Olbricht Fabrication and characterization of microfluidic probes for convection enhanced drug delivery J. Control. Release 111 2006 252 262
37. Z.J. Chen, G.T. Gillies, W.C. Broaddus, S.S. Prabhu, H. Fillmore, and R.M. Mitchell et al. A realistic brain tissue phantom for intraparenchymal infusion studies J. Neurosurg. 101 2004 314 322 (Pubitemid 38971010)
38. Q. Chen, B. Suki, and K.N. An Dynamic mechanical properties of agarose gels modeled by a fractional derivative model J. Biomech. Eng. 126 2004 666 671 (Pubitemid 40019153)
39. E. Kim, H. Tu, C. Lv, H. Jiang, H. Yu, and Y. Xu A robust polymer microcable structure for flexible devices Appl. Phys. Lett. 102 2013 033506 33514
40. W. Jensen, K. Yoshida, and U.G. Hofmann In-vivo implant mechanics of flexible, silicon-based ACREO microelectrode arrays in rat cerebral cortex IEEE Trans. Biomed. Eng. 53 2006 934 940 (Pubitemid 43667752)
41. A.A. Sharp, A.M. Ortega, D. Restrepo, D. Curran-Everett, and K. Gall In vivo penetration mechanics and mechanical properties of mouse brain tissue at micrometer scales IEEE Trans. Biomed. Eng. 56 2009 45 53