메뉴 건너뛰기




Volumn , Issue , 2000, Pages

Numerical modeling of czochralski silicon crystal growth

Author keywords

Czochralski crystal growth; Global heat transfer; Stephan problem; Turbulent flow

Indexed keywords

BOUSSINESQ APPROXIMATIONS; CZOCHRALSKI SILICON CRYSTAL GROWTHS; MELT-CRYSTAL INTERFACE SHAPE; MELT-CRYSTAL INTERFACES; MODEL OF HEAT TRANSFERS; REYNOLDS AVERAGED NAVIER-STOKES EQUATION; STEPHAN PROBLEM; TURBULENT MELT CONVECTION;

EID: 84893376016     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (9)

References (11)
  • 6
    • 0032302927 scopus 로고    scopus 로고
    • Semiconductor process and device performance modelling
    • S.T. Dunham, J.S. Nelson (Eds.), MRS, Pennsylvania
    • Yu.E. Egorov, Yu.N. Makarov, E.A. Rudinsky, E.M. Smirnov, A.I. Zhmakin, in: S.T. Dunham, J.S. Nelson (Eds.), Semiconductor Process and Device Performance Modelling, Mat. Res. Soc. Symp. Proc., vol.490, MRS, Pennsylvania, 1998, p.181.
    • (1998) Mat. Res. Soc. Symp. Proc. , vol.490 , pp. 181
    • Egorov, Y.E.1    Makarov, Y.N.2    Rudinsky, E.A.3    Smirnov, E.M.4    Zhmakin, A.I.5
  • 10
    • 84893367681 scopus 로고    scopus 로고
    • CFD-ACE, Version 5, October, Huntsville, AL
    • CFD-ACE, Command Language Manual, Version 5, October 1998, CFD Research Corporation, Huntsville, AL., http://www.cfdrc.com.
    • (1998) Command Language Manual


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.