On the gas dependence of thermal transpiration and a critical appraisal of correction methods for capacitive diaphragm gauges

Vacuum

Volumn 104, Issue , 2014, Pages 77-87

  Daudé, Barthélémy ^a   Elandaloussi, Hadj ^a,b   Janssen, Christof ^a,b  

^a SORBONNE UNIVERSITÉ   (France)

^b CNRS   (France)

Author keywords

Diaphragm gauge; Metrology; Pressure; Rarefaction; Styrene; Thermal transpiration

Indexed keywords

CAPACITANCE DIAPHRAGM GAUGES; CHARACTERISTIC PRESSURES; DIAPHRAGM GAUGES; PRESSURE DEPENDENCIES; RAREFACTION; TEMPERATURE DIFFERENCES; THERMAL TRANSPIRATION; THERMAL TRANSPIRATION EFFECT;

DIAPHRAGMS; MEASUREMENTS; MOLECULES; PRESSURE; PRESSURE MEASUREMENT; STYRENE; TRANSPIRATION;

GAGES;

EID: 84893296294     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2014.01.002     Document Type: Article

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