DSMC analysis of thermal transpiration of capacitance diaphragm gauge

Vacuum

Volumn 67, Issue 3-4, 2002, Pages 301-306

  Nishizawa, Shin Ichi ^a   Hirata, Masahiro ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Capacitance diaphragm gauge; DSMC; Pressure distribution; Sensitivity; Thermal transpiration effect

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; MONTE CARLO METHODS; PRESSURE DISTRIBUTION; VISCOUS FLOW;

THERMAL TRANSPIRATION EFFECT;

VACUUM GAGES;

EID: 0037179752     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00212-9     Document Type: Conference Paper

References (3)

1. Bird G.A. Molecular gas dynamics and the direct simulation of gas flow. 1994;Oxford University Press, Oxford.
2. Takaishi T., Sensui Y. Trans Faraday Soc. 59:1963;2503.
3. Jitschin W., Rohl P. J Vac Sci Technol A. 5:1987;372.