On the stability of capacitance-diaphragm gauges with ceramic membranes

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 29, Issue 1, 2011, Pages

  Jousten, K ^a   Naef, Simon ^b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b INFICON AG   (Liechtenstein)

Author keywords

[No Author keywords available]

Indexed keywords

EXPANSION METHODS; FULL SCALE; LONG TERM STABILITY; PRIMARY STANDARDS; PRODUCTION LINE; REPRODUCIBILITIES;

CAPACITANCE; CERAMIC MEMBRANES; GAGES;

DIAPHRAGMS;

EID: 79952033385     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3529023     Document Type: Article

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