Sub-10 nanometer uncooled platinum bolometers via plasma enhanced atomic layer deposition

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2013, Pages 185-188

  Purkl, Fabian ^a,b   English, Tim ^c   Yama, Gary ^b   Provine, J ^c   Samarao, Ashwin K ^b   Feyh, Ando ^b   O'Brien, Gary ^b   Ambacher, Oliver ^a   Howe, Roger T ^c   Kenny, Thomas W ^c  

^a UNIVERSITY OF FREIBURG   (Germany)

^b BOSCH RESEARCH AND TECHNOLOGY CENTER   (United States)

^c STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NOISE EQUIVALENT TEMPERATURE DIFFERENCE; PLASMA-ENHANCED ATOMIC LAYER DEPOSITION; PLATINUM THERMISTORS; RESPONSIVITY; THERMAL TIME CONSTANTS; ULTRA-THIN; UNCOOLED; UNCOOLED INFRARED DETECTORS;

ATOMIC LAYER DEPOSITION; DEPOSITION; INFRARED DETECTORS; PLATINUM;

MEMS;

EID: 84875410164     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2013.6474208     Document Type: Conference Paper

References (8)

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