Antireflective grassy surface on glass substrates with self-masked dry etching

Nanoscale Research Letters

Volumn 8, Issue 1, 2013, Pages 1-5

  Song, Young Min ^a,b   Park, Gyeong Cheol ^a   Kang, Eun Kyu ^a   Yeo, Chan Il ^a   Lee, Yong Tak ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b Pusan National University   (South Korea)

Author keywords

Antireflection; Glass; Hydrophilicity; Self masked dry etching; Subwavelength structure

Indexed keywords

BIOMIMETICS; GLASS; HYDROPHILICITY; NANOSTRUCTURES; SUBSTRATES;

ANTI-REFLECTION; DRY ETCH PROCESS; GLASS SUBSTRATES; NANOSTRUCTURE FABRICATION; RIGOROUS COUPLED WAVE ANALYSIS; SUB-WAVELENGTH STRUCTURES; TRANSPARENT GLASS; WAVELENGTH RANGES;

DRY ETCHING;

EID: 84891446490     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1186/1556-276X-8-505     Document Type: Article

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