Low-temperature preparation of (002)-oriented ZnO thin films by sol-gel method

Thin Solid Films

Volumn 550, Issue , 2014, Pages 250-258

  Guo, Dongyun ^a   Sato, Kuninori ^b   Hibino, Shingo ^b   Takeuchi, Tetsuya ^b   Bessho, Hisami ^b   Kato, Kazumi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b Tokai Rubber Industries Ltd   (Japan)

Author keywords

Aggregation; Baking temperature; Crystalline orientation; Sol gel deposition; Thin films; Zinc oxide

Indexed keywords

AGGLOMERATION; ANNEALING; BAKERIES; DEPOSITION; FILM GROWTH; FILM PREPARATION; GRAIN GROWTH; HYDROLYSIS; II-VI SEMICONDUCTORS; METALLIC FILMS; NANOCRYSTALLINE MATERIALS; OPTICAL FILMS; OXIDE FILMS; OXIDE MINERALS; SILICON COMPOUNDS; SOL-GEL PROCESS; SOL-GELS; SUBSTRATES; TEMPERATURE; THERMOLYSIS; ZINC OXIDE;

ANNEALING TEMPERATURES; BAKING TEMPERATURE; CRYSTALLINE ORIENTATIONS; LOW TEMPERATURE PREPARATION; ORIENTED AGGREGATION; ORIENTED ATTACHMENT; SOL-GEL DEPOSITION; SOLUTION CONCENTRATION;

THIN FILMS;

EID: 84890315751     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2013.11.004     Document Type: Article

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