Transmittance enhancement of sapphires with antireflective subwavelength grating patterned UV polymer surface structures by soft lithography

Optics Express

Volumn 21, Issue 24, 2013, Pages 29298-29303

  Lee, Soo Hyun ^a   Leem, Jung Woo ^a   Yu, Jae Su ^a  

^a Kyung Hee University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CORUNDUM; LITHOGRAPHY; POLYMER FILMS; POLYMERS; SURFACE CHEMISTRY; SURFACE STRUCTURE;

DIFFUSE TRANSMISSION; HYDROPHOBIC SURFACES; OPTICAL CALCULATIONS; OPTICAL CHARACTERISTICS; RIGOROUS COUPLED WAVE ANALYSIS; SUB-WAVE LENGTH GRATING; TRANSMITTANCE SPECTRA; ULTRAVIOLET CURABLE;

SAPPHIRE;

ALUMINUM OXIDE; EPOXIDE; NANOPARTICLE; POLYMER; SU 8 COMPOUND; SU-8 COMPOUND;

ADSORPTION; ARTICLE; CHEMISTRY; MATERIALS TESTING; METHODOLOGY; MOLECULAR IMPRINTING; PHOTOGRAPHY; RADIATION EXPOSURE; REFRACTOMETRY; SURFACE PROPERTY; ULTRAVIOLET RADIATION;

ADSORPTION; ALUMINUM OXIDE; EPOXY COMPOUNDS; MATERIALS TESTING; MOLECULAR IMPRINTING; NANOPARTICLES; PHOTOGRAPHY; POLYMERS; REFRACTOMETRY; SURFACE PROPERTIES; ULTRAVIOLET RAYS;

EID: 84890054689     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.21.029298     Document Type: Article

References (14)

1. K. Bao, X. N. Kang, B. Zhang, T. Dai, C. Xiong, H. Ji, G. Y. Zhang, and Y. Chen, "Improvement of light extraction from patterned polymer encapsulated GaN-based flip-chip light-emitting diodes by imprinting," IEEE Photonics Technol. Lett. 19(22), 1840-1842 (2007).
2. M. Viefhues, J. Regtmeier, and D. Anselmetti, "Nanofluidic devices for dielectrophoretic mobility shift assays by soft lithography," J. Micromech. Microeng. 22(11), 115024 (2012).
3. E. Sollier, C. Murray, P. Maoddi, and D. Di Carlo, "Rapid prototyping polymers for microfluidic devices and high pressure injections," Lab Chip 11(22), 3752-3765 (2011).
4. T. W. Odom, J. C. Love, D. B. Wolfe, K. E. Paul, and G. M. Whitesides, "Improved pattern transfer in soft lithography using composite stamps," Langmuir 18(13), 5314-5320 (2002).
5. T. W. Lee, O. Mitrofanov, and J. W. P. Hsu, "Pattern-transfer fidelity in soft lithography: the role of pattern density and aspect ratio," Adv. Funct. Mater. 15(10), 1683-1688 (2005).
6. N. Jiang, E. T. Foley, J. M. Klingsporn, M. D. Sonntag, N. A. Valley, J. A. Dieringer, T. Seideman, G. C. Schatz, M. C. Hersam, and R. P. Van Duyne, "Observation of multiple vibrational modes in ultrahigh vacuum tip-enhanced Raman spectroscopy combined with molecular-resolution scanning tunneling microscopy," Nano Lett. 12(10), 5061-5067 (2012).
7. T. Aubert, O. Elmazria, B. Assouar, L. Bouvot, and M. Oudich, "Surface acoustic wave devices based on AlN/sapphire structure for high temperature applications," Appl. Phys. Lett. 96(20), 203503 (2010).
8. B. S. Patel and Z. H. Zaidi, "The suitability of sapphire for laser windows," Meas. Sci. Technol. 10(3), 146-151 (1999).
9. Y. R. Lin, H. P. Wang, C. A. Lin, and J. H. He, "Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings," J. Appl. Phys. 106(11), 114310 (2009).
10. J. W. Leem, Y. M. Song, Y. T. Lee, and J. S. Yu, "Effect of etching parameters on antireflection properties of Si subwavelength grating structures for solar cell applications," Appl. Phys. B 100(4), 891-896 (2010).
11. J. H. Yeo, J. J. Ryu, B. K. Lee, E. H. Byeon, T. H. Kwon, and D. S. Kim, "Theoretical and experimental characterization of wettability of various nanolens arrayed polymer surfaces replicated with nanodimpled aluminum mold insert," Microsyst. Technol. 16(8-9), 1425-1430 (2010).
12. Y. H. Ko and J. S. Yu, "Design of hemi-urchin shaped ZnO nanostructures for broadband and wide-angle antireflection coatings," Opt. Express 19(1), 297-305 (2011).
13. J. W. Leem, Y. H. Yeh, and J. S. Yu, "Enhanced transmittance and hydrophilicity of nanostructured glass substrates with antireflective properties using disordered gold nanopatterns," Opt. Express 20(4), 4056-4066 (2012).
14. O. P. Parida and N. Bhat, "Characterization of optical properties of SU-8 and fabrication of optical components," in Proc. Int. Conf. on Opt. Photon. (CSIO, Chandigarh, India, 2009), pp. 1-4.