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Volumn 40, Issue 2, 2014, Pages 3461-3468
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Influence of Sb doping on the structural, optical, electrical and acetone sensing properties of In2O3 thin films
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Author keywords
Acetone sensor; In2O3 thin film; Sb doping; Spray pyrolysis
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Indexed keywords
ACETONE SENSOR;
CHEMICAL SPRAY PYROLYSIS;
DOPANT PRECURSORS;
GAS SENSING PROPERTIES;
INDIUM OXIDE THIN FILMS;
OPERATING TEMPERATURE;
ROOM TEMPERATURE;
SB-DOPING;
ACETONE;
ELECTRIC CONDUCTIVITY;
GAS SENSING ELECTRODES;
INDIUM;
OPACITY;
SEMICONDUCTOR DOPING;
SPRAY PYROLYSIS;
SUBSTRATES;
TEMPERATURE;
THIN FILMS;
VAPORS;
X RAY DIFFRACTION;
X RAY DIFFRACTION ANALYSIS;
ANTIMONY;
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EID: 84889094131
PISSN: 02728842
EISSN: None
Source Type: Journal
DOI: 10.1016/j.ceramint.2013.09.084 Document Type: Article |
Times cited : (34)
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References (30)
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