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Volumn 20, Issue 2, 2011, Pages 123-127
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Pd-gate MOS sensor for detection of methanol and propanol
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Author keywords
cracks; gas sensor; MOS structure; palladium; sensitivity
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Indexed keywords
CAPACITANCE VOLTAGE;
GAS MOLECULES;
GAS SENSOR;
GATE FILMS;
GATE MATERIALS;
GATE METALS;
HIGH SENSITIVITY;
HYDROGEN PERMEATION;
MORPHOLOGY AND COMPOSITION;
MOS SENSORS;
MOS STRUCTURE;
SEM;
SENSITIVITY;
ATOMIC FORCE MICROSCOPY;
CAPACITANCE;
CAPACITANCE MEASUREMENT;
CHEMICAL ANALYSIS;
CRACKS;
GAS DETECTORS;
GAS PERMEABLE MEMBRANES;
METHANOL;
PROPANOL;
SCANNING ELECTRON MICROSCOPY;
SENSORS;
PALLADIUM;
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EID: 79953322061
PISSN: 10039953
EISSN: None
Source Type: Journal
DOI: 10.1016/S1003-9953(10)60165-X Document Type: Article |
Times cited : (13)
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References (25)
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