Transparent and conducting intrinsic ZnO thin films prepared at high growth-rate with c-axis orientation and pyramidal surface texture

Applied Surface Science

Volumn 286, Issue , 2013, Pages 397-404

  Mondal, Praloy ^a   Das, Debajyoti ^a  

^a DEPARTMENT OF MATERIALS SCIENCE   (India)

Author keywords

C axis orientation; High growth rate; Magnetron sputtering; Pyramidal surface texture; Transparent conducting oxide; ZnO thin film

Indexed keywords

BOND LENGTH; CHEMICAL SENSORS; CONDUCTIVE FILMS; CRYSTAL ORIENTATION; DEPOSITION RATES; FILM GROWTH; FILM PREPARATION; II-VI SEMICONDUCTORS; IONIZATION OF GASES; LIGHT SCATTERING; MAGNETRON SPUTTERING; METALLIC FILMS; OPTICAL FILMS; OXYGEN; OXYGEN VACANCIES; SILICON SOLAR CELLS; SURFACE ROUGHNESS; THIN FILM SOLAR CELLS; TRANSPARENT CONDUCTING OXIDES; VACANCIES; ZINC OXIDE; ZINC SULFIDE;

C-AXIS ORIENTATIONS; CHEMICAL SENSING APPLICATIONS; HEXAGONAL WURTZITE STRUCTURE; HIGH GROWTH RATE; ROOM-TEMPERATURE CONDUCTIVITY; SURFACE TEXTURES; THIN-FILM SILICON SOLAR CELLS; ZNO THIN FILM;

THIN FILMS;

EID: 84887499499     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2013.09.099     Document Type: Article

References (25)

1. S. Saha, and V. Gupta Journal of Applied Physics 110 2011 064904
2. Ü. Özgür, Ya.I. Alivov, C. Liu, A. Teke, M.A. Reshchikov, S. Doǧan, V. Avrutin, S.J. Cho, and H. Morkoçd Journal of Applied Physics 98 2005 041301
3. D. Das, and R. Banerjee Thin Solid Films 147 1987 321
4. R. Banerjee, and D. Das Thin Solid Films 149 1987 291
5. R. Banerjee, D. Das, S. Ray, A.K. Batabyal, and A.K. Barua Solar Energy Materials 13 1986 11
6. H. Czternastek Opto-Electronics Review 12 2004 49
7. C. Gua, J. Huanga, Y. Wua, M. Zhaia, Y. Sunc, and J. Liu Journal of Alloys and Compounds 509 2011 4499
8. C.Y. Jiang, X.W. Sun, G.Q. Lo, D.L. Kwong, and J.X. Wang Applied Physics Letters 90 2007 263501
9. G. Xiong, J. Wilkinson, B. Mischuck, S. Tuzemen, K.B. Ucer, and R.T. Williams Applied Physics Letters 80 2002 1195
10. A. Tsukazaki, M. Kubota, A. Ohotomo, T. Onuma, K. Ohtani, H. Ohno, S.F. Chichibu, and M. Kawasaki Japanese Journal of Applied Physics 44 2005 L 643
11. R. Swanepoel Journal of Physics E: Scientific Instruments 16 1983 1214
12. S. Dutta, S. Chattopadhyay, D. Jana, A. Banerjee, S. Manik, S.K. Pradhan, M. Sutradhar, and A. Sarkar Journal of Applied Physics 100 2006 114328
13. H. Yoshikawa, and S. Adachi Japanese Journal of Applied Physics 36 1997 6237
14. J.H. Kang, Y.R. Park, and K.J. Kim Solid State Communications 115 2000 127
15. J.I. Pankove Optical Processes in Semiconductors 1975 Dover Publications New York
16. Z.Z. Youa, and G.J. Hua Journal of Alloys and Compounds 530 2012 11
17. A. Drici, G. Djeteli, G. Tchangbedji, H. Derouiche, K. Jondo, K. Napo, J.C. Bernède, S. Ouro-Djobo, and M. Gbagba Physica Status Solidi A 201 2004 1528
18. C.S. Barret, and T.B. Massalski Structure of Metals 1980 Pergamon Press Oxford
19. H. Morkoç, and Ü. Özgur Zinc Oxide: Fundamentals, Materials and Device Technology 2009 Wiley-VCH Verlag GmbH & Co. KGaA Weinheim
20. X.Y. Peng, M. Sajjad, J. Chu, B.Q. Yang, and P.X. Feng Applied Surface Science 257 2011 4795
21. C.R. Aita, A.J. Purdes, R.J. Lad, and P.D. Funkenbusch Journal of Applied Physics 51 1980 5533
22. B. Houng, and H.B. Chen Ceramics International 38 2012 801
23. P.K. Samanta, and S. Basak Materials Letters 83 2012 97
24. N.K. Singha, S. Shrivastava, S. Ratha, and S. Annapoornia Applied Surface Science 257 2010 1544
25. Y. Ma, G.T. Du, S.R. Yang, Z.T. Li, B.J. Zhao, X.T. Yang, T.P. Yang, Y.T. Zhang, and D.L. Liu Journal of Applied Physics 95 2004 6268