Inkjet printed SU-8 hemispherical microcapsules and silicon chip embedding

Micro and Nano Letters

Volumn 8, Issue 10, 2013, Pages 633-636

  Jacot Descombes, Loic ^a   Gullo, Maurizio Rosario ^a   Mastrangeli, Massimo ^a   Cadarso, Victor Javier ^a   Brugger, Jürgen ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

DROP-ON-DEMAND; INNER CAVITIES; MICROCAPSULES; PLANAR LITHOGRAPHY; PRECISE FABRICATIONS; SILICON CHIP; SILICON MICROCHIPS; SILICON SUBSTRATES;

FABRICATION; INK; LITHOGRAPHY; PRINTING; SILICON;

ENCAPSULATION;

INK; SILICON;

CONFERENCE PAPER; CROSS LINKING; ENCAPSULATION; INKJET; MICROCAPSULE; NANOCHIP; NANOFABRICATION; PRINTING; SURFACE TENSION;

EID: 84887038128     PISSN: None     EISSN: 17500443     Source Type: Journal    
DOI: 10.1049/mnl.2013.0241     Document Type: Conference Paper

References (22)

1. Oosterbroek E., Berg A.v.d.: 'Lab-on-a-chip: miniaturized systems for (Bio) chemical analysis and synthesis' (Elsevier, 2003)
2. Johnston A.P.R., Cortez C., Angelatos A.S., Caruso F.: 'Layer-by-layer engineered capsules and their applications', Curr. Opin. Coll. Interface Sci., 2006, 11, pp. 203-209
3. Donath E., Sukhorukov G.B., Caruso F., Davis S.A., Mohwald H.: 'Novel hollow polymer shells by colloid-templated assembly of polyelectrolytes', Angew. Chem., Int. Ed., 1998, 37, pp. 2202-2205
4. Nagstrup J., Keller S., Almdal K., Boisen A.: '3D microstructuring of biodegradable polymers', Microelectron. Eng., 2011, 88, pp. 2342-2344
5. Marizza P., Keller S.S., Boisen A.: 'Inkjet printing as a technique for filling of micro-wells with biocompatible polymers', Microelectron. Eng., 2013, 11, pp. 391-395
6. Martin F.J., Grove C.: 'Microfabricated drug delivery systems: concepts to improve clinical benefit', Biomed. Microdevices, 2001, 3, pp. 97-108
7. Terfort A., Bowden N., Whitesides G.M.: 'Three-dimensional self-assembly of millimetre-scale components', Nature, 1997, 386, pp. 162-164
8. Mastrangeli M., Abbasi S., Varel C., Hoof C.V., Celis J.P., Bohringer K.F.: 'Self-assembly from milli- to nanoscales: methods and applications', J. Micromech. Microeng., 2009, 19, pp. 083001-083038
9. Orhan J.B., Parashar V.K., Sayah A., Gijs M.A.M.: 'Fabrication and characterization of three-dimensional microlens arrays in sol-gel glass', J. Microelectromech. Syst., 2006, 15, pp. 1159-1164
10. Chen C.-T., Chiu C.-L., Tseng Z.-F., Chuang C.-T.: 'Dynamic evolvement and formation of refractive microlenses self-assembled from evaporative polyurethane droplets', Sens. Actuators A, Phys., 2008, 147, pp. 369-377
11. Lee E.R.: 'Microdrop generation' (Taylor &Francis, 2010)
12. Fakhfouri V., Mermoud G., Kim J.Y., Martinoli A., Brugger J.: 'Drop-on-demand inkjet printing of SU-8 polymer', Micro Nanosyst., 2009, 1, pp. 63-67
13. Kim J.Y., Brauer N.B., Fakhfouri V., ET AL.: 'Hybrid polymer microlens arrays with high numerical apertures fabricated using simple ink-jet printing technique', Opt. Mater. Express, 2011, 1, pp. 259-269
14. Biehl S., Danzebrink R., Oliveira P., Aegerter M.A.: 'Refractive microlens fabrication by ink-jet process', J. Sol-Gel Sci. Technol., 1998, 13, pp. 177-182
15. Voigt A., Ostrzinski U., Pfeiffer K., ET AL.: 'New inks for the direct drop-on-demand fabrication of polymer lenses', Microelectron. Eng., 2011, 88, pp. 2174-2179
16. Cadarso V.J., Perera-Nuñez J., Jacot-Descombes L., ET AL.: 'Microlenses with defined contour shapes', Opt. Express, 2011, 19, pp. 18665-18670
17. Fakhfouri V., Cantale N., Mermoud G., ET AL.: 'Inkjet printing of SU-8 for polymer-based MEMS a case study for microlenses'. Proc. IEEE 21st Int. Conf. on MEMS, Tuscon, AZ, USA, 2008, pp. 407-410
18. Kim J.Y., Martin-Olmos C., Baek N.S., Brugger J.: 'Simple and easily controllable parabolic-shaped microlenses printed on polymeric mesas', J. Mater. Chem. C, 2013
19. Jacot-Descombes L., Gullo M.R., Cadarso V.J., Brugger J.: 'Fabrication of epoxy spherical microstructures by controlled drop-on-demand inkjet printing', J. Micromech. Microeng., 2012, 22, pp. 074012-074012
20. Chen C.-T., Tu K.-Z.: 'Inkjet printing of individual polymer micro parts self-shaped with hemispherical caps', Sens. Actuators A, Phys., 2012, 188, pp. 367-373
21. Jacot-Descombes L., Gullo M.R., Mastrangeli M., Cadarso V.J., Brugger J.: 'Polymeric hemispherical pico-liter micro cups fabricated by inkjet printing'. Int. Conf. Nano/Micro Engineered and Molecular Systems (NEMS), Suzhou, China, 2013, pp. 1119-1122
22. Despont M., Lorenz H., Fahrni N., Brugger J., Renaud P., Vettiger P.: 'High-aspect-ratio, ultrathick, negative-tone near-uv photoresist for MEMS applications', Proc. IEEE 10th Int. Workshop on MEMS, Nagoya, Japan, 1997, pp. 518-522