Area-selective ZnO thin film deposition on variable microgap electrodes and their impact on UV sensing

Journal of Nanomaterials

Volumn 2013, Issue , 2013, Pages

  Humayun, Q ^a   Kashif, M ^a   Hashim, U ^a  

^a UNIVERSITY MALAYSIA PERLIS   (Malaysia)

Author keywords

[No Author keywords available]

Indexed keywords

CONVENTIONAL PHOTOLITHOGRAPHY; FABRICATED SENSORS; LOW OPERATING VOLTAGE; LOW-POWER CONSUMPTION; MICRO-GAP ELECTRODES; MINIATURIZED DEVICES; REPRODUCIBILITIES; SOL-GEL SPIN COATING;

DYNAMIC RESPONSE; ELECTRIC PROPERTIES; FABRICATION; GOLD DEPOSITS; METALLIC FILMS; OPTICAL FILMS; PHOTOLITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; SENSORS; SOL-GELS; X RAY DIFFRACTION;

ELECTRODES;

EID: 84886924929     PISSN: 16874110     EISSN: 16874129     Source Type: Journal    
DOI: 10.1155/2013/301674     Document Type: Article

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