Scanning probe microscopy based electrical characterization of thin dielectric and organic semiconductor films

Microelectronics Reliability

Volumn 53, Issue 9-11, 2013, Pages 1430-1433

  Hofer, Alexander ^a   Biberger, Roland ^a   Benstetter, Günther ^a   Wilke, Björn ^b   Göbel, Holger ^b  

^a DEGGENDORF INSTITUTE OF TECHNOLOGY   (Germany)

^b HELMUT SCHMIDT UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION METHODS; CONTACT MODE OPERATIONS; ELECTRICAL CHARACTERIZATION; ORGANIC SEMICONDUCTOR FILMS; SCANNING PROBE MICROSCOPY TECHNIQUES; SEMICONDUCTOR FILMS; TOPOGRAPHICAL VARIATIONS; TORSIONAL RESONANCES;

CAPACITANCE; RESONANCE;

SCANNING PROBE MICROSCOPY;

EID: 84886905350     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2013.07.086     Document Type: Conference Paper

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