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Volumn 205-206, Issue , 2014, Pages 89-93

10 cm diameter mono cast Si growth and its characterization

Author keywords

Crystallization; Dislocations; Mono silicon; Precipitation; Seed cast growth

Indexed keywords

CRYSTALLIZATION; DEFECTS; DISLOCATIONS (CRYSTALS); INGOTS; PRECIPITATION (CHEMICAL); SEMICONDUCTOR DEVICE MANUFACTURE; SILICON; TOPOGRAPHY;

EID: 84886792777     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/SSP.205-206.89     Document Type: Conference Paper
Times cited : (5)

References (8)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.