Combined molecular dynamics and analytical model for repetitive cluster bombardment of solids

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 303, Issue , 2013, Pages 196-199

  Garrison, Barbara J ^a   Paruch, Robert J ^b   Postawa, Zbigniew ^b  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b JAGIELLONIAN UNIVERSITY   (Poland)

Author keywords

Depth profiling; Molecular dynamics; Secondary ion mass spectrometry; Sputtering; Steady state statistical sputtering model

Indexed keywords

DEPTH PROFILING; DIFFERENTIAL EQUATIONS; SECONDARY ION MASS SPECTROMETRY; SPUTTERING;

AG(111); CLUSTER BEAMS; CLUSTER BOMBARDMENT; MD SIMULATION; MOLECULAR DYNAMICS SIMULATIONS; SPUTTERING MODELS; STEADY STATE;

MOLECULAR DYNAMICS;

EID: 84884813461     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2012.10.016     Document Type: Article

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