Embossing-based process variants for polymer microfabrication

Proceedings - ASPE Spring Topical Meeting on Precision Micro/Nano Scale Polymer Based Component and Device Fabrication, ASPE 2005

Volumn , Issue , 2005, Pages 20-24

  Yao, Donggang ^a   Kim, Byung ^b   Yi, Allen ^c  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b University of Massachusetts   (United States)

^c Ohio State University   (United States)

Author keywords

Embossing; Hot embossing; Micro molding; Polymer microfabrication

Indexed keywords

ECONOMIC EFFICIENCY; EMBOSSING; HOT-EMBOSSING; MICRO MOLDING; MICRO-FABRICATION TECHNOLOGY; PERFORMANCE CRITERION; POLYMER MICROFABRICATION; PROCESS IMPROVEMENT;

MICROANALYSIS; MICROFABRICATION; SPRINGS (COMPONENTS);

POLYMERS;

EID: 84884655286     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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