메뉴 건너뛰기




Volumn 2013, Issue , 2013, Pages

Raman spectra of high-κ dielectric layers investigated with micro-raman spectroscopy comparison with silicon dioxide

Author keywords

[No Author keywords available]

Indexed keywords

GADOLINIUM; HAFNIUM; LANTHANUM; SILICON DIOXIDE; HAFNIUM OXIDE; LANTHANUM OXIDE; LUTETIUM; OXIDE; SILICON;

EID: 84884220840     PISSN: None     EISSN: 1537744X     Source Type: Journal    
DOI: 10.1155/2013/208081     Document Type: Article
Times cited : (33)

References (18)
  • 1
    • 0042697357 scopus 로고    scopus 로고
    • Leakage current mechanisms and leakage reduction techniques in deep-submicrometer CMOS circuits
    • 2-s2.0-0042697357 10.1109/JPROC.2002.808156
    • Roy K., Mukhopadhyay S., Mahmoodi-Meimand H., Leakage current mechanisms and leakage reduction techniques in deep-submicrometer CMOS circuits. Proceedings of the IEEE 2003 91 2 305 327 2-s2.0-0042697357 10.1109/JPROC.2002. 808156
    • (2003) Proceedings of the IEEE , vol.91 , Issue.2 , pp. 305-327
    • Roy, K.1    Mukhopadhyay, S.2    Mahmoodi-Meimand, H.3
  • 2
    • 84884258504 scopus 로고    scopus 로고
    • Improving performance and reliability of MOS devices using deuterium implantation
    • Rijeka, Croatia InTech, University Campus STeP Ri
    • Lee J.-S., Vasileska D., Improving performance and reliability of MOS devices using deuterium implantation. Cutting Edge Nanotechnology 2010 Rijeka, Croatia InTech, University Campus STeP Ri 15 32. http://www.intechopen.com/ books/cutting-edge-nanotechnology/improving-performance-and-reliability-of-mos- devices-using-deuterium-implantation
    • (2010) Cutting Edge Nanotechnology , pp. 15-32
    • Lee, J.-S.1    Vasileska, D.2
  • 5
    • 36449005810 scopus 로고
    • Micro-Raman study of stress distribution in local isolation structures and correlation with transmission electron microscopy
    • 2-s2.0-36449005810 10.1063/1.351311
    • De Wolf I., Vanhellemont J., Romano-Rodríguez A., Norström H., Maes H. E., Micro-Raman study of stress distribution in local isolation structures and correlation with transmission electron microscopy. Journal of Applied Physics 1992 71 2 898 906 2-s2.0-36449005810 10.1063/1.351311
    • (1992) Journal of Applied Physics , vol.71 , Issue.2 , pp. 898-906
    • De Wolf, I.1    Vanhellemont, J.2    Romano-Rodríguez, A.3    Norström, H.4    Maes, H.E.5
  • 6
    • 0001732439 scopus 로고
    • Raman spectrum of pressure compacted fused silica
    • 2-s2.0-0001732439
    • Walrafen G. E., Krishnan P. N., Raman spectrum of pressure compacted fused silica. The Journal of Chemical Physics 1981 74 9 5328 5330 2-s2.0-0001732439
    • (1981) The Journal of Chemical Physics , vol.74 , Issue.9 , pp. 5328-5330
    • Walrafen, G.E.1    Krishnan, P.N.2
  • 7
    • 84884254546 scopus 로고    scopus 로고
    • Chemistry World, RSC Advancing the Chemical Science February 2007
    • Milgrom L., Hafnium Oxide Helps Make Chips Smaller and Faster Chemistry World, RSC Advancing the Chemical Science. February 2007, http://www.rsc.org/ chemistryworld/News/2007/February/05020702.asp
    • Hafnium Oxide Helps Make Chips Smaller and Faster
    • Milgrom, L.1
  • 9
    • 0000174303 scopus 로고
    • Multiphonon Raman spectrum of silicon
    • 2-s2.0-0000174303 10.1103/PhysRevB.7.3685
    • Temple P. A., Hathaway C. E., Multiphonon Raman spectrum of silicon. Physical Review B 1973 7 8 3685 3697 2-s2.0-0000174303 10.1103/PhysRevB.7.3685
    • (1973) Physical Review B , vol.7 , Issue.8 , pp. 3685-3697
    • Temple, P.A.1    Hathaway, C.E.2
  • 10
    • 0032208053 scopus 로고    scopus 로고
    • Optical characterization of layers for silicon microelectronics
    • 2-s2.0-0032208053
    • Chabli A., Optical characterization of layers for silicon microelectronics. Microelectronic Engineering 1998 40 3-4 263 274 2-s2.0-0032208053
    • (1998) Microelectronic Engineering , vol.40 , Issue.3-4 , pp. 263-274
    • Chabli, A.1
  • 11
    • 5744232792 scopus 로고    scopus 로고
    • Wavelength- and temperature-dependent measurement of refractive indices
    • 2-s2.0-5744232792 10.1364/JOSAB.21.000729
    • Jasny J., Nickel B., Borowicz P., Wavelength- and temperature-dependent measurement of refractive indices. Journal of the Optical Society of America B 2004 21 4 729 738 2-s2.0-5744232792 10.1364/JOSAB.21.000729
    • (2004) Journal of the Optical Society of America B , vol.21 , Issue.4 , pp. 729-738
    • Jasny, J.1    Nickel, B.2    Borowicz, P.3
  • 12
    • 0141843685 scopus 로고    scopus 로고
    • 2 films on silicon: A review
    • 2-s2.0-0141843685 10.1016/S0022-3093(03)00467-8
    • 2 films on silicon: a review. Journal of Non-Crystalline Solids 2003 328 1-3 48 63 2-s2.0-0141843685 10.1016/S0022-3093(03)00467-8
    • (2003) Journal of Non-Crystalline Solids , vol.328 , Issue.1-3 , pp. 48-63
    • Revesz, A.G.1    Hughes, H.L.2
  • 13
    • 0028315684 scopus 로고
    • Raman spectroscopic study of microcrystalline silica
    • 2-s2.0-0028315684
    • Kingma K. J., Hemley R. J., Raman spectroscopic study of microcrystalline silica. American Mineralogist 1994 79 3-4 269 273 2-s2.0-0028315684
    • (1994) American Mineralogist , vol.79 , Issue.3-4 , pp. 269-273
    • Kingma, K.J.1    Hemley, R.J.2
  • 14
    • 0001080899 scopus 로고
    • Raman spectroscopic investigation of irreversibly compacted vitreous silica
    • 2-s2.0-0001080899
    • Walrafen G. E., Chu Y. C., Hokmabadi M. S., Raman spectroscopic investigation of irreversibly compacted vitreous silica. The Journal of Chemical Physics 1990 92 12 6987 7002 2-s2.0-0001080899
    • (1990) The Journal of Chemical Physics , vol.92 , Issue.12 , pp. 6987-7002
    • Walrafen, G.E.1    Chu, Y.C.2    Hokmabadi, M.S.3
  • 15
    • 37049032148 scopus 로고    scopus 로고
    • High pressure elastic and plastic deformations of silica: In situ diamond anvil cell Raman experiments
    • 2-s2.0-37049032148 10.1016/j.jnoncrysol.2007.07.079
    • Champagnon B., Martinet C., Boudeulle M., Vouagner D., Coussa C., Deschamps T., Grosvalet L., High pressure elastic and plastic deformations of silica: in situ diamond anvil cell Raman experiments. Journal of Non-Crystalline Solids 2008 354 2-9 569 573 2-s2.0-37049032148 10.1016/j.jnoncrysol.2007.07.079
    • (2008) Journal of Non-Crystalline Solids , vol.354 , Issue.2-9 , pp. 569-573
    • Champagnon, B.1    Martinet, C.2    Boudeulle, M.3    Vouagner, D.4    Coussa, C.5    Deschamps, T.6    Grosvalet, L.7
  • 18
    • 0034325092 scopus 로고    scopus 로고
    • Vibrational modes in amorphous silicon dioxide
    • 2-s2.0-0034325092 10.1016/S0921-4526(00)00475-0
    • Gunde M. K., Vibrational modes in amorphous silicon dioxide. Physica B 2000 292 3-4 286 295 2-s2.0-0034325092 10.1016/S0921-4526(00)00475-0
    • (2000) Physica B , vol.292 , Issue.3-4 , pp. 286-295
    • Gunde, M.K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.