Optical characterization of layers for silicon microelectronics

Microelectronic Engineering

Volumn 40, Issue 3-4, 1998, Pages 263-274

  Chabli, A ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; LIGHT REFLECTION; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON;

X RAY SPECULAR REFLECTOMETRY;

MICROELECTRONICS;

EID: 0032208053     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(98)00276-7     Document Type: Article

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