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Volumn 29, Issue 36, 2013, Pages 11535-11545

Biorecognition by DNA oligonucleotides after exposure to photoresists and resist removers

Author keywords

[No Author keywords available]

Indexed keywords

COMPLEMENTARY STRAND; DNA OLIGONUCLEOTIDES; FLUORESCENCE IMAGING; INTEGRATED CIRCUIT TECHNOLOGY; LITHOGRAPHIC MICROFABRICATION; PHOTOLITHOGRAPHIC PROCESS; SILICON TECHNOLOGIES; SINGLE-BASE MISMATCH;

EID: 84884186921     PISSN: 07437463     EISSN: 15205827     Source Type: Journal    
DOI: 10.1021/la402362u     Document Type: Article
Times cited : (1)

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