Dilute aqueous base developable resists for environmentally friendly and biocompatible processes

Microelectronic Engineering

Volumn 61-62, Issue , 2002, Pages 819-827

  Diakoumakos, Constantinos D ^a   Douvas, Antonios ^a,c   Raptis, Ioannis ^a   Kakabakos, Sotiris ^b   Dimotikalli, Dimitra ^c   Terzoudi, Georgia ^d   Argitis, Panagiotis ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

^b INSTITUTE OF NANOSCIENCE AND NANOTECHNOLOGY   (Greece)

^c NATIONAL TECHNICAL UNIVERSITY OF ATHENS   (Greece)

^d INSTITUTE OF NUCLEAR TECHNOLOGY AND RADIATION PROTECTION   (Greece)

Author keywords

(Meth)acrylate photoresists; Biocompatible photoresists; Chemically amplified photoresists; Dilute aqueous TMAH developers; Environmentally friendly processing; Protein patterning

Indexed keywords

BIOCOMPATIBLE PHOTORESISTS;

BIOCOMPATIBILITY; COPOLYMERS; ESTERS; IMAGING TECHNIQUES; MICROELECTRONICS; MICROSTRUCTURE; PROTEINS; SOLUTIONS; SYNTHESIS (CHEMICAL);

PHOTORESISTS;

EID: 17344378804     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00451-3     Document Type: Article

References (7)