Plasma hydrogenated, reactively sputtered aluminium oxide for silicon surface passivation

Physica Status Solidi - Rapid Research Letters

Volumn 7, Issue 9, 2013, Pages 619-622

  Zhang, Xinyu ^a   Cuevas, Andres ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

Aluminium oxide; Hydrogenation; Silicon; Solar cells; Sputtering; Surface passivation

Indexed keywords

ALUMINIUM OXIDE; CRYSTALLINE SILICON WAFERS; EFFECTIVE LIFETIME; FTIR MEASUREMENTS; MINORITY CARRIER LIFETIMES; PLASMA HYDROGENATED; SILICON OXIDE LAYERS; SURFACE PASSIVATION;

ATOMIC LAYER DEPOSITION; HYDROGEN; HYDROGENATION; PASSIVATION; SILICON; SILICON OXIDES; SOLAR CELLS; SPUTTERING;

SILICON WAFERS;

EID: 84884179761     PISSN: 18626254     EISSN: 18626270     Source Type: Journal    
DOI: 10.1002/pssr.201308027     Document Type: Article

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