Plastic compatible sputtered ta-inf o sensitive layer for oxide semiconductor tft sensors

IEEE/OSA Journal of Display Technology

Volumn 9, Issue 9, 2013, Pages 723-728

  Branquinho, Rita ^a   Pinto, Joana V ^a   Busani, Tito ^a   Barquinha, Pedro ^a   Pereira, Luis ^a   Baptista, Pedro Viana ^a   Martins, Rodrigo ^a   Fortunato, Elvira ^a  

^a UNIVERSIDADE NOVA DE LISBOA   (Portugal)

Author keywords

Biosensors; Electrolyte insulator semiconductor (eis) sensor; Ph sensitivity; Sputtered + hbox ta 2 hbox O 5

Indexed keywords

ELECTROLYTE-INSULATOR-SEMICONDUCTOR SENSORS; INCREASING TEMPERATURES; LOW TEMPERATURE ANNEALING; MORPHOLOGICAL FEATURES; OXIDE SEMICONDUCTOR; PH SENSITIVITY; POST DEPOSITION ANNEALING; SPUTTERED +{\HBOX{TA}}-{2}{\HBOX{O}}5;

AMORPHOUS FILMS; ANNEALING; BIOSENSORS; ELECTROLYTES; PH SENSORS;

SENSORS;

EID: 84883805532     PISSN: 1551319X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JDT.2012.2229693     Document Type: Article

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