Nanostructure characterization of high k materials by spectroscopic ellipsometry

Applied Surface Science

Volumn 253, Issue 1 SPEC. ISS., 2006, Pages 339-343

  Pereira, L ^a   Aguas H ^a   Fortunato, E ^a   Martins, R ^a  

^a UNIVERSIDADE NOVA DE LISBOA   (Portugal)

Author keywords

Spectroscopic ellipsometry; Tantalum oxide; Titanium oxide

Indexed keywords

AMORPHOUS FILMS; ANNEALING; DIELECTRIC MATERIALS; ELLIPSOMETRY; FILM GROWTH; MAGNETRON SPUTTERING; TANTALUM COMPOUNDS;

INCUBATION LAYER; RADIO FREQUENCY; SPECTROSCOPIC ELLIPSOMETRY; TAUC-LORENTZ DISPERSION;

NANOSTRUCTURED MATERIALS;

EID: 33750516728     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.06.007     Document Type: Article

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