Investigation of pulsed ultraviolet laser annealing of Sb/SnO2 thin films on the structural, optical and electrical properties

Surface and Coatings Technology

Volumn 231, Issue , 2013, Pages 374-379

  Wang, Chun Min ^a   Huang, Chun Chieh ^b   Kuo, Jui Chao ^a   Huang, Jow Lay ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b CHENG SHIU UNIVERSITY   (Taiwan)

Author keywords

Laser processing; Sb; SnO2; Sputtering; Transparent conductive oxide (TCO)

Indexed keywords

INTERFACE MI-CROSTRUCTURE; ION BEAM SPUTTERING DEPOSITION; LASER PROCESS; NANOCRYSTALLINE THIN FILMS; OPTICAL AND ELECTRICAL PROPERTIES; RADIO FREQUENCY MAGNETRON SPUTTERING; SNO2; TRANSPARENT CONDUCTIVE OXIDES;

AMORPHOUS FILMS; ANTIMONY; DEPOSITION; ELECTRIC PROPERTIES; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; INTERFACES (MATERIALS); LASER BEAM EFFECTS; MAGNETRON SPUTTERING; SPUTTERING; THIN FILMS; ULTRAVIOLET LASERS;

OPTICAL FILMS;

EID: 84882870520     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2012.07.065     Document Type: Article

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