Preparing transparent conductive Sn/Sb-O 2 - X thin films by annealing bi-layer Sb/SnO 2 with pulse UV laser

Materials Letters

Volumn 72, Issue , 2012, Pages 29-31

  Wang, Chun Min ^a   Huang, Chun Chieh ^b   Kuo, Jui Chao ^a   Lin, Hao Tung ^b   Huang, Jow Lay ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b CHENG SHIU UNIVERSITY   (Taiwan)

Author keywords

Antimony; Laser processing; Sputtering; Tin oxide; Transparent conductive oxide (TCO)

Indexed keywords

BI-LAYER; BI-LAYER FILMS; CHEMICAL STATE; ELECTRICAL BEHAVIORS; GLASS SUBSTRATES; ION BEAM SPUTTERING DEPOSITION; LASER PROCESSING; PULSED ULTRAVIOLET; RADIO FREQUENCY MAGNETRON SPUTTERING; TRANSPARENT CONDUCTIVE; TRANSPARENT CONDUCTIVE OXIDES; UV LASERS; X RAY PHOTOELECTRON SPECTROSCOPIES (XPS);

ANTIMONY; MAGNETRON SPUTTERING; OXIDE FILMS; SPUTTERING; SUBSTRATES; THIN FILMS; TIN; TIN OXIDES; X RAY PHOTOELECTRON SPECTROSCOPY;

CONDUCTIVE FILMS;

EID: 84862799588     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2011.12.031     Document Type: Article

References (17)

1. 2 thin films Thin Solid Films 517 2009 6129 6136
2. Y. Huang, G. Li, J. Feng, and Q. Zhang Investigation on structural, electrical and optical properties of tungsten-doped tin oxide thin films Thin Solid Films 518 2009 1892 1895
3. 2 Appl Surf Sci 179 2001 301 306
4. 2 films Mater Res Bull 34 1999 1527 1533
5. 2:Sb sol-gel films using excimer laser annealing Appl Surf Sci 208-9 2003 382 387
6. 2:Sb for flexible electronics Thin Solid Films 515 2007 8534 8538
7. T. Alzanki, R. Gwilliam, N. Emerson, and B.J. Sealy Differential Hall effect profiling of ultrashallow junctions in Sb implanted silicon Appl Phys Lett 85 2004 1979 1980
8. B. Straumal, B. Baretzky, A. Mazilkin, S. Protasova, A. Myatiev, and P. Straumal Increase of Mn solubility with decreasing grain size in ZnO J Eur Ceram Soc 29 2009 1963 1970
9. S.Y. Lee, S.C. Wang, J.S. Chen, and J.L. Huang Effects of deposition and post-annealing conditions on electrical properties and thermal stability of TiAlN films by ion beam sputter deposition Thin Solid Films 515 2006 1069 1073
10. B.B. Straumal, S.G. Protasova, A.A. Mazilkin, A.A. Myatiev, P.B. Straumal, and G. Schütz Ferromagnetic properties of the Mn-doped nanograined ZnO films J Appl Phys 108 2010 073923-1-6
11. B.B. Straumal, A.A. Mazilkin, S.G. Protasova, A.A. Myatiev, P.B. Straumal, and B. Baretzky Increase of Co solubility with decreasing grain size in ZnO Acta Mater 56 2008 6246 6256
12. 2 nanophase catalysts J Catal 205 2002 266 277
13. F. Garbassi XPS and AES study of antimony oxides Surf Interface Anal 2 1980 165 169
14. 2 thin films Acta Mater 57 2009 278 285
15. B.B. Straumal, A.A. Myatiev, P.B. Straumal, A.A. Mazilkin, S.G. Protasova, and E. Goering Grain boundary in nanocrystalline ferromagnetic zinc oxide JETP Lett 92 2010 396 400
16. E. Burstein Anomalous optical absorption limit in InSb Phys Rev 93 1954 632 633
17. T.S. Moss The interpretation of the properties of indium antimonide Proc Phys Soc London Sect B 67 1954 775 782