Toward hard yet tough CrAlSiN coatings via compositional grading

Surface and Coatings Technology

Volumn 231, Issue , 2013, Pages 346-352

  Wang, Yu Xi ^a   Zhang, Sam ^a   Lee, Jyh Wei ^b   Lew, Wen Siang ^c   Sun, Deen ^d   Li, Bo ^e  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b MING CHI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^c NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^d Singapore Epson Industrial Pte Ltd   (Singapore)

^e CENTRAL IRON AND STEEL RESEARCH INSTITUTE   (China)

Author keywords

CrAlSiN; Gradient structure; Magnetron sputtering; Toughness

Indexed keywords

COMPOSITIONAL GRADING; CRACK PROPAGATION RESISTANCE; CRALSIN; CRALSIN COATING; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; GLANCING ANGLE; GRADED COMPOSITION; GRADIENT STRUCTURE;

FIELD EMISSION MICROSCOPES; GRADING; MAGNETRON SPUTTERING; TOUGHNESS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

HARD COATINGS;

EID: 84882836761     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2012.03.036     Document Type: Article

References (22)

1. Ding X.-z., Zeng X.T., Liu Y.C., Fang F.Z., Lim G.C. Thin Solid Films 2008, 516:1710.
2. Ding X.-z., Tan A.L.K., Zeng X.T., Wang C., Yue T., Sun C.Q. Thin Solid Films 2008, 516:5716.
3. Banakh O., Schmid P.E., Sanjinés R., Lévy F. Surf. Coat. Technol. 2003, 163-164:57.
4. Chen H.-W., Chan Y.-C., Lee J.-W., Duh J.-G. Surf. Coat. Technol. 2010, 205:1189.
5. Chen H.-W., Chan Y.-C., Lee J.-W., Duh J.-G. Surf. Coat. Technol. 2011, 206:1571.
6. Lee D.B., Nguyen T.D., Kim S.K. Surf. Coat. Technol. 2009, 203:1199.
7. Ziebert C., Ulrich S. J. Vac. Sci. Technol., A 2006, 24:554.
8. Zhang S., Sun D., Fu Y., Du H. Surf. Coat. Technol. 2005, 198:2.
9. Helmersson U., Todorova S., Barnett S.A., Sundgren J.E., Markert L.C., Greene J.E. J. Appl. Phys. 1987, 62:481.
10. Karimi A., Wang Y., Cselle T., Morstein M. Thin Solid Films 2002, 420-421:275.
11. Lin J., Moore J.J., Moerbe W.C., Pinkas M., Mishra B., Doll G.L., Sproul W.D. Int. J. Refract. Met. Hard Mater. 2010, 28:2.
12. Zhang S., Bui X.L., Fu Y., Butler D.L., Du H. Diam. Relat. Mater. 2004, 13:867.
13. Zhang S., Sun D., Fu Y., Du H. Surf. Coat. Technol. 2005, 198:74.
14. Zhang S., Sun D., Fu Y., Du H. Thin Solid Films 2004, 447-448:462.
15. Bertóti I. Surf. Coat. Technol. 2002, 151-152:194.
16. Barshilia H.C., Deepthi B., Rajam K.S. Surf. Coat. Technol. 2007, 201:9468.
17. Veprek S., Zhang R.F., Veprek-Heijman M.G.J., Sheng S.H., Argon A.S. Surf. Coat. Technol. 2010, 204:1898.
18. Veprek S., Veprek-Heijman M.G.J. Surf. Coat. Technol. 2007, 201:6064.
19. Veprek S., Veprek-Heijman M.G.J., Karvankova P., Prochazka J. Thin Solid Films 2005, 476:1.
20. Veprek S., Argon A.S. J. Vac. Sci. Technol. B 2002, 20:650.
21. Chen J., Bull S.J. J. Phys. D 2011, 44.
22. Toque J.A., Herliansyah M.K., Hamdi M., Ide-Ektessabi A., Sopyan I. J. Vac. Sci. Technol. B 2010, 3:324.