Fabrication of well-controlled wavy metal interconnect structures on stress-free elastomeric substrates

Microelectronic Engineering

Volumn 113, Issue , 2014, Pages 55-60

  Park, Chan Woo ^a   Jung, Soon Won ^a   Lim, Sang Chul ^a   Oh, Ji Young ^a   Na, Bock Soon ^a   Lee, Sang Seok ^a   Chu, Hye Yong ^a   Koo, Jae Bon ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

Elastomeric substrate; Stretchable electronics; Wavy electrode

Indexed keywords

ACTIVE DEVICES; ELASTOMERIC SUBSTRATES; INTERCONNECT STRUCTURES; METAL INTERCONNECTS; PRE-STRETCHING; STRETCHABLE ELECTRONICS; WAVY STRUCTURES; WEARABLE ELECTRONICS;

PHOTOLITHOGRAPHY;

SUBSTRATES;

EID: 84882437490     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2013.07.012     Document Type: Article

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