Photolithographic structuring of stretchable conductors and sub-kPa pressure sensors

Journal of Micromechanics and Microengineering

Volumn 21, Issue 11, 2011, Pages

  Tuinea Bobe, C L ^a   Lemoine, P ^b   Manzoor, M U ^b   Tweedie, M ^b   D'Sa, R A ^b   Gehin, C ^c   Wallace, E ^b  

^a UNIVERSITY OF BRADFORD   (United Kingdom)

^b UNIVERSITY OF ULSTER   (United Kingdom)

^c INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT ANGLE ANALYSIS; ELECTRICAL MEASUREMENT; GOLD FILM; NOVEL METHODS; PATTERNING METHODS; PATTERNING PROCESS; PDMS SURFACES; PRESSURE SENSITIVITIES; RESISTIVITY VALUES; SEM MICROGRAPHS; SMART FABRIC;

ATOMIC FORCE MICROSCOPY; CHEMICAL ANALYSIS; CONDUCTIVE FILMS; CONTACT ANGLE; CRACKS; GAGES; GOLD; METALLIC FILMS; MICROCHANNELS; PHOTOELECTRON SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; STRAIN; SURFACE CHEMISTRY; SURFACE TREATMENT; THREE DIMENSIONAL; X RAY PHOTOELECTRON SPECTROSCOPY;

PRESSURE SENSORS;

EID: 80555123658     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/11/115010     Document Type: Article

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